Photonics Research Incorporated

Bandgap Technology Corporation

Terry Krafft

Method and apparatus for generating and delivering a gas that contains vapor produced by subliming a solid for use in chemical vapor deposition processes such as Metal Organic Molecular Beam Epitaxy (MOMBE) and Organometallic Vapor Phase Epitaxy (OMVPE). The method includes generating a gas saturated with the vapor and subsequently diluting the gas with an inert gas to obtain an uniform non-saturated gas. The apparatus includes a vessel for containing a sublimable solid, a heater for maintaining the vessel at a desired temperature, tubes and valves for introducing a gas into the vessel and for discharging a gas that is saturated with the vapor of the solid from the vessel, and a tube and a valve for diluting a gas discharged from the vessel.

Method and apparatus for delivering gas

Method for forming metal alkyl compounds by the direct combination of metal halide, lithium metal, and alkyl or aryl halide and for purifying metal alkyl compounds by repeated sublimation/pumping cycles. The method can be used to produce metal alkyl compounds which are substantially free of volatile impurities.

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Longmont, CO, United States of America

Terry Krafft