International Business Machines Corporation

Terry J Brabazon

Carter W Kaanta

Badih El-Kareh

Matthew J Rutten

Stuart R Martin

A precision analog metal-metal capacitor is fabricated by forming a first capacitor plate in an insulation layer by forming a trench therein, depositing metal within the trench and planarizing the device. A thin dielectric layer is then deposited and patterned over the first capacitor plate. A second insulator is then deposited over the device and discrete openings etched therein to expose the insulation layer and first metal plate. Metal is deposited within the openings and planarized, thereby forming a contact to the first metal plate and the second metal plate of the capacitor.

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Essex Junction, VT, United States of America

Terry J Brabazon