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Raytheon Company

Terence Roach

Donald F DeCou

A multispectrum light detection system for controlling exposure time of a photoresist coated substrate in a projection aligner-printer machine wherein the relatively narrow spectral responsivity characteristics of a selected photoresist is matched to the wider spectrum inherent in the output flux of a combined light source and optical system. A representative sample of the system's wide spectrum output flux is divided into three or more narrower spectral bands each of which is measured by its own detector that provides an electrical signal proportional to the radiant flux intensity within that band. The resultant electrical signals from the separate spectral bands are weighted and combined in a summing amplifier to form a composite exposure control signal. Means are provided to adjust the contribution of each electrical signal to the combined control signal in accordance with known spectral response characteristics of the photoresist.

Multispectral light detection system

A radiation detector, particularly suitable for use in computerized tomographic scanning systems, comprising a scintillator crystal having one window surface optically connected with a photodetector, preferably a semiconductor device, and having other surfaces diffused and tapered whereby the window surface is enabled to see all other surfaces so as to provide efficient passage of light photons from the crystal through the polished surface to the photodetector.

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Fairfield, CT, United States of America

Terence Roach