Cymer, Inc.

Terance Hilsabeck

William N Partlo

Richard L Sandstrom

Daniel J W Brown

Thomas Patrick Duffey

Bryan George Moosman

James J Ferrell

Tae H Chung

One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.

Gas discharge laser chamber

Growing community of inventors

San Marcos, CA, United States of America

Terance Hilsabeck