Kla Corporation

Teng-Song Lim

John Charles Robinson

David W Price

Robert J Rathert

Oreste Donzella

Barry Saville

Mike Von Den Hoff

Kara L Sherman

Robert Cappel

Thomas Groos

Naema Bhatti

Doug Sutherland

An inspection system may include a controller communicatively coupled to one or more in-line sample analysis tools including, but not limited to, an inspection tool or a metrology tool. The controller may identify defects in a population of dies based on data received from at least one of the one or more in-line sample analysis tools, assign weights to the identified defects indicative of predicted impact of the identified defects on reliability of the dies using a weighted defectivity model, generate defectivity scores for the dies in the population by aggregating the weighted defects in the respective dies in the population, and determine a set of outlier dies based on the defectivity scores for the dies in the population, wherein at least some of the set of outlier dies are isolated from the population.

Advanced in-line part average testing

Growing community of inventors

Singapore, Singapore

Teng-Song Lim