Macronix International Co., Ltd.

Teng Hao Yeh

Hang-Ting Lue

Wei-Chen Chen

Guan-Ru Lee

Chih-Wei Hu

Wu-Chin Peng

Cheng-Yu Lee

Chih-Ming Lin

Yu Wei Jiang

Liu Yiching Liu

A three-dimensional flash memory device may be a AND flash memory device. The three-dimensional flash memory device includes: a substrate, a gate stack structure, a plurality of slit structures, a plurality of memory arrays, and a plurality of conductive pillars. The gate stack structure is located above the substrate. The plurality of slit structures extend through the gate stack structure and divide the gate stack structure into a plurality of blocks. The plurality of memory arrays are disposed in the gate stack structure of the plurality of blocks. The plurality of conductive pillars extends through the gate stack structure in the plurality of blocks, and disposed between the plurality of memory arrays and between the plurality of slit structures.

3D flash memory device and method of manufacturing the same

Provided are a 3D flash memory and an array layout thereof. The 3D flash memory includes a gate stack structure, a annular channel pillar, a first source/drain pillar, a second source/drain pillar and a charge storage structure. The gate stack structure is disposed on a dielectric base and includes a plurality of gate layers electrically insulated from each other. The annular channel pillar is disposed on the dielectric base and penetrates through the gate stack structure. The first source/drain pillar and the second source/drain pillar are disposed on the dielectric base, are located within the channel pillar and penetrate through the gate stack structure. The first source/drain pillar and the second source/drain pillar are separated from each other and are each connected to the channel pillar. The charge storage structure is disposed between each of the plurality of gate layers and the channel pillar.

3D semiconductor device and array layout with isolated conductive pillars

A 3D AND flash memory device includes a gate stack structure, a channel pillar, a source pillar, a charge storage structure, a first transistor and a second transistor. The gate stack structure is located on a dielectric substrate, wherein the gate stack structure includes a plurality of gate layers and a plurality of insulating layers alternately stacked. The channel pillar extends through the gate stack structure. The source pillar and the drain pillar are disposed in the channel pillar and electrically connected to the channel pillar. The charge storage structure is located between the plurality of gate layers and the channel pillar. The first transistor is located above the gate stack structure and electrically connected to the drain pillar. The second transistor is located above the gate stack structure and electrically connected to the source pillar.

3D and flash memory device and method of fabricating the same

A memory device and a word line driver thereof are provided. The word line driver includes a first word line signal generator, a second word line signal generator, a first voltage generator, and a second voltage generator. The first word line signal generator selects one of a first voltage and a second voltage to generate a first word line signal according a control signal. The second word line signal generator selects one of a third voltage and a fourth voltage to generate a second word line signal according the control signal. The first voltage generator provides the second voltage, and the second voltage generator provides the fourth voltage, where the first voltage generator is independent to the second voltage generator.

Memory device and word line driver thereof

3D flash memory with annular channel structure and array layout thereof

A semiconductor structure and a manufacturing method are provided. The semiconductor structure includes a substrate, conductive layers, insulating layers, a memory structure including first memory structure clusters and second memory structure clusters, isolation trenches, and common source trenches. The conductive layers and the insulating layers are interlaced and stacked on the substrate. Each first memory structure cluster include first memory structures and each first memory structure cluster include second memory structures. The first and second memory structures penetrate the conductive layers and the insulating layers. Each isolation trench is formed between a first memory structure cluster and a second memory structure cluster. The isolation trenches span horizontally on the substrate in a discontinuous manner separated by gaps. Common source trenches are formed on the substrate that run substantially parallel with the isolation trenches.

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Hsinchu, Taiwan

Teng Hao Yeh