Industrial Technology Research Institute

Tean-Mu Shen

Ming-Hsin Liu

Jung-Chen Chien

Fu-Ching Tung

Kuan-Chou Chen

Muh-Wang Liang

Chia-Ming Chen

Tsung-Hsin Lin

Pei-Shan Wu

Chun-Chien Chen

Jung-Chen Ho

Ming-Shinn Liou

Chen-Chung Du

Jiun-Hung Chen

Hong-Sheng Fang

Cheng-Chan Tsai

Chun-chien Chen

Chih-Hung Liu

Shen-Bin Wu

Jung-chen Chien

Jung-chen Chein

Ming-Tung Chiang

Chin-Feng Cheng

Ping-Chun Liu

Ming-Te Hsiung

A plasma generator, a surface treatment method using the same, and a surface treatment method using the same for bio-tissue are provided. The plasma generator comprises a plasma tube, a reaction source tube, a first electrode and a second electrode. The plasma tube has a plasma outlet. The reaction source tube is disposed within the plasma tube, and has a reaction outlet. The first electrode and the second electrode are disposed on the plasma tube, wherein the second electrode is closer to the plasma outlet than the first electrode is. The plasma outlet of the reaction source is not projected beyond a lower portion of the first electrode.

Plasma generator, surface treatment method using the same and surface treatment method using the same for bio-tissue

A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.

Cathode discharge apparatus

A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.

Vacuum apparatus of rotary motion entry

The present invention provides a hollow cathode discharging apparatus including a hollow anode electrode, a hollow cathode electrode insulatedly fixed in the hollow anode electrode, a gas distribution pipe fixed in the hollow cathode electrode. The hollow anode electrode and the hollow cathode electrode are formed with anode openings and cathode openings respectively. Defined by the gas distribution pipe and the hollow cathode electrode and along the axis thereof is a spiral pathway winding through the cathode openings, so as to form a plurality of continuous and communicated reaction chambers. The gas distribution pipe is disposed with gas separation apertures communicated and adapted to introduce a reactive gas into the reaction chambers. The communicated reaction chambers enable uniform distribution of the reactive gas and thereby facilitate scale-up of the apparatus in axial. Accordingly, the present invention overcomes drawbacks of the prior art.

Hollow cathode discharging apparatus

An anode layer particle beam device includes a base, at least an anode placed on top of the base, an insulation layer set between the anode and the base, at least one magnetic pole, made of magnetic and conductive material and can be used as a cathode, an electric discharge channel, positioned between the anode and the magnetic pole, and an insulating material, placed in the electric discharge channel to serve as an insulator between the anode and the magnetic pole. The magnetic pole is positioned on top of the base and on an somewhat elevated outer periphery of the aforementioned anode (with the center of the later also as its center). An orifice is also set on the radiation path of the anode. Accordingly, a process gas stream can be directed into the electric discharge channel and, after being applied with a biased electric field, with the aide of the anode and the magnetic pole device, a particle beam can be generated and radiated out of the channel.

Anode layer particle beam device

A multi-stage vacuum pump includes a plurality of casings connected in series and each casing defining a respective compression chamber, a plurality of partition plates each set in between each two casings. When compressed by rotors at shafts in one compression chamber, compressed air passes through the air path formed in the corresponding partition plate to the next compression chamber for further compression, and finally compressed air passes to the last compression chamber through the air path formed in the last partition plate. Because the invention is designed to let compressed air directly pass through the air path in each partition plate, the outer diameter and volume of the multi-stage vacuum pump can be minimized to reduce the weight and the manufacturing cost.

Multi-stage vacuum pump

A combination double screw rotor assembly includes a first and a second screw rotor arranged in parallel in a casing, two sets of bearings respectively mounted in the casing near the outlet to support the shafts, and a plurality of locking means respectively fastened to the shafts near the inlet. The first and the second screw rotor each has a low pressure screw rotor element, a high pressure screw rotor element, and a spiral thread formed of a first spiral thread segment at the high pressure screw rotor element and a second spiral thread segment at the low pressure screw rotor element, the first spiral thread segment having an uniform short pitch, the second spiral thread segment having an uniform long pitch, the first spiral thread segment and second spiral thread segment of the first and the second screw rotor being respectively meshed together.

Combination double screw rotor assembly

A combination double screw rotor assembly includes a first screw rotor and a second screw rotor arranged in parallel in a casing, the first screw rotor and the second screw rotor each having a low pressure screw rotor element, a high pressure screw rotor element, and a spiral thread formed of a first spiral thread segment at the high pressure screw rotor element and a second spiral thread segment at the low pressure screw rotor element, the first spiral thread segment having an uniform short pitch, the second spiral thread segment having an uniform long pitch, the upper spiral thread segment and second spiral thread segment of the first screw rotor being respectively meshed with the first spiral thread segment and second spiral thread segment of the second screw rotor. During operation of the combination double screw rotor assembly, the flow of air moves from relatively greater air chambers around the low pressure screw rotor elements of the screw rotors toward the relatively smaller air chambers around the high pressure screw rotor elements of the screw rotors, and is compressed in the relatively smaller air chambers, preventing a reverse flow due to a significant pressure difference between the forwarding flow of air and the area around the outlet, so as to minimize power loss and operation noise.

A nozzle device for purging a vacuum pump includes a nozzle, the top portion of the nozzle is a tapered portion, two sides of the tapered portion are installed with nozzle holes for guiding the exhausted air sub-flow to be exhausted from the two sides of vent end.

Nozzle device for purging a vacuum pump

A multistage pump includes a shaft assembly and a housing and spacing plates. The shaft assembly completed by forming shafts and rotors integrally. The spacing plates defining a plurality of successive compression chambers, each chamber is delimited by two symmetrical spacing plates, there has a ring groove associated with the spacing plates, and having an elastic component placed. When the elastic component pressed by the housing, it became leakage and the clearance between the rotors and the spacing plates be easily controlled, by this way, the pump using parts are easy to manufacture, can be machined accurately and which enable highly accurate assembly to be achieved. As to the assembling method, which is characterized by mounting the high pressure end axial bearing seat and the high pressured end plate, then to control the clearance between the high pressure end plate of the bearing seat and the rotors. Furthermore, to install the spacing plates and the housing make the compression chamber formed.

Growing community of inventors

Hsinchu, Taiwan

Tean-Mu Shen