United Microelectronics Corp.

Sifotonics Technologies Co., Ltd.

Te-huang Chiu

Weng-Yi Chen

Kuan-Yu Wang

Dong Pan

Chang-Sheng Hsu

Mengyuan Huang

Ching-yin Hong

Meng-Jia Lin

Tzung-Han Tan

Tzung-I Su

Zuoxi Li

Various embodiments of a monolithic avalanche photodiode (APD) are described, which may be fabricated on a silicon-on-insulator substrate. The monolithic APD includes an optical waveguide that guides an incident light to an active region of the APD. An optical coupler is integrally formed with the optical waveguide to capture the incident light. The monolithic APD also includes an optical reflector to reflect a portion of the incident light that is not readily captured by the optical coupler back to the optical coupler for further capturing. The active region includes an absorption layer for converting the incident light into a photocurrent, an epitaxial structure for amplifying the photocurrent by avalanche multiplication, as well as a pair of electrical conductors for conducting the amplified photocurrent.

Waveguide-integrated avalanche photodiode

A manufacturing method for a semiconductor structure is disclosed. The semiconductor structure includes a MEMS region. The MEMS region includes a sensing membrane and a metal ring. The metal ring defines a cavity under the sensing membrane.

Manufacturing method for semiconductor structure

A semiconductor structure and a manufacturing method for the same are disclosed. The semiconductor structure includes a MEMS region. The MEMS region includes a sensing membrane and a metal ring. The metal ring defines a cavity under the sensing membrane.

Semiconductor structure and manufacturing method for the same

An avalanche photodetector device includes a substrate having a front side and a back side, an avalanche photo detector structure disposed on the front side of the substrate, a plurality of heat sinks disposed on the back side of the substrate, and a plurality of reflecting islands disposed on the back side of the substrate.

Avalanche photo detector device and manufacturing method thereof

Growing community of inventors

Hsinchu, Taiwan

Te-huang Chiu