Kabushiki Kaisha Toshiba

Tatuya Saeki

Hiroaki Kobayashi

Yasushi Shinjo

Certain embodiments provided a coating apparatus includes an applicator, material supply unit, and first, second, and third moving mechanisms. The applicator includes a meniscus pillar forming portion configured to form a meniscus pillar of the material in conjunction with a surface to be coated of the object to be coated and a recess. The material supply unit supplies the material to the applicator. The first moving mechanism moves the position of the applicator relative to the surface along the surface. The second moving mechanism moves the position of the applicator relative to the surface so that the meniscus pillar between the surface and the recess. The third moving mechanism moves the position of the applicator relatively toward and away from the surface.

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Yokohama, Japan

Tatuya Saeki