Matsushita Electric Industrial Co., Ltd.

Matsushita Electrons Corporation

Tatsuya Obata

Yoshiaki Kato

Susumu Akamatsu

Toshitaka Hibi

Toyoyuki Shimazaki

Tadami Shimizu

Takehiko Ueda

After a gate insulating film, a gate electrode and an on-gate protective layer have been formed in this order on an Si substrate, lightly-doped source/drain regions are formed in the substrate. First and second sidewalls are formed on the sides of the gate electrode and then heavily-doped source/drain regions are formed by implanting dopant ions using these sidewalls as a mask. After the second sidewall has been selectively removed, pocket implanted regions are formed and an overall protective film is deposited. Thereafter, an interlevel dielectric film is deposited, contact holes are formed to reach the heavily-doped source/drain regions and then plug electrodes are formed. Since the second sidewall has already been removed when the overall protective film is deposited, the gap between adjacent gate electrodes is not completely filled in. Accordingly, it is possible to provide a method for fabricating a semiconductor device contributing to device miniaturization without causing a shortcircuit between the gate electrode and a contact member.

Semiconductor device

Method for fabricating semiconductor device

Growing community of inventors

Toyama, Japan

Tatsuya Obata