Mitutoyo Corporation

Tatsuya Nagahama

Kenji Okabe

Yuko Shishido

Toru Yaku

Atsushi Usami

Masaki Okayasu

Sadayuki Matsumiya

Shigeru Ohtani

Yoshiro Asano

Koji Kubo

Yu Sugai

Masanori Arai

Miyako Mizutani

Masafumi Yamanaka

Nobuya Kaneko

Gyokubu Cho

Seiji Shimokawa

Yuki Kurahashi

Isaiah Freerksen

Kimitoshi Ono

Takahisa Ootake

Satoru Yoshida

Hiroyuki Yoshida

Robert Kamil Bryll

Johannes Anna Quaedackers

Hiroki Matsui

Hiroshi Sakai

Eric Altendorf

Hidemitsu Asano

Shiro Igasaki

Jyota Miyakura

Yutaka Watanabe

Taizo Nakamura

Hitoshi Isobe

Eisuke Moriuchi

Ken Motohashi

Kazuki Kitagawa

Han Haitjema

Katsuyoshi Arisawa

Nobuo Ohba

Hirotaka Matsubara

Emi Kaneko

Kuniaki Obata

Naoto Oita

An adapter optical system, which is an optical system configured to guide reflection light reflected by an object and passing through an imaging lens to a liquid resonant lens, includes: a first lens unit removably disposed at a position where the reflection light passing through the imaging lens enters and constituting an image-side telecentric optical system; and a second lens unit disposed at a position where the reflection light passing through the first lens unit enters and constituting a finite correction optical system in combination with the liquid resonant lens.

Adapter optical system and focal length variable optical system

A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

Telecentric optical apparatus

A variable focal length lens apparatus includes an objective lens and an imaging lens that are aligned on the same optical axis; a front side lens system and a rear side lens system that are disposed in a section between the objective lens and the imaging lens on the optical axis, and change a refractive index in accordance with an input drive signal; and a diaphragm disposed in the section between the front side lens system and the rear side lens system on the optical axis.

Variable focal length lens apparatus

An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.

Image pick-up device, image measurement apparatus, non-contact displacement-detecting device and non-contact profile-measuring device

A variable focal length lens apparatus includes a lens system where a refractive index changes in response to an input drive signal; a field lens arranged on the same optical axis as the lens system; an image detector detecting an image of a measured object through the lens system and the field lens; a pulse illuminator providing pulse illumination of the measured object based on an input light emission signal; a temperature sensor detecting temperature information for an interior of the lens system; and a controller outputting the drive signal and the light emission signal in addition to correcting the timing of the light emission signal based on the temperature information.

An imaging system includes: an image forming device that obtains image information of an object with the focal length to the object being changed by a variable focal length lens in an optical system, so as to form an all-focused image of the object; a sensor device that detects variations in the surface level of the object in a focus direction; and a position adjustment device that adjusts the position of the object in the focus direction in accordance with the surface level variations of the object detected by the sensor device. The position adjustment device adjusts the position of the object in the focus direction in such a manner that the surface level of the object becomes closer to the center of a variable focal length range of the variable focal length lens.

Imaging system and imaging method

Variable focal length lens

An imaging system including a tunable acoustic gradient (TAG) lens is associated with a user interface including a live display of an extended depth of field (EDOF) image. The TAG lens is utilized to produce a raw EDOF image, which may include defocus blur (e.g., resulting in part from the periodically modulated optical power variation of the TAG lens). The live EDOF image is repetitively updated in the user interface based on a translation state signal at a current time (e.g., indicating a speed of translation of the workpiece across a field of view of the imaging system, etc.) In response to a current state of the translation state signal, a corresponding type of live EDOF image of the workpiece is displayed in the user interface corresponding to an EDOF image data set that is based on a corresponding level of image processing to remove defocus blur.

Variable focal length lens system with multi-level extended depth of field image processing

A measurement system includes detachable parts, on which one filter module out of a plurality of filter modules including optical filters that each transmit different types of special light is detachably mounted, a specification part that specifies the optical filter of the one filter module mounted on the detachable parts, and a set value switching part that switches, according to the specified optical filter specified by the specification part, set values for adjustment used in a measurement using a specific optical filter.

Measurement system and method for switching set value for adjustment

The present invention provides an interference measuring device with an optical system that can receive light reflected from a measurement object of a surface profile that is not perpendicular to an optical axis. An interference measuring device includes a light source for emitting light and an interferometric objective lens. The interferometric objective lens includes a reference mirror disposed in a reference beam path and a beam splitter that splits the incident light into a beam traveling along the reference beam path and a beam traveling along a measurement beam path. The beam splitter also combines the beam reflected off the reference mirror with the beam reflected off a measurement object disposed in the measurement beam path before emitting the combined beams. The interference measuring device further includes an imaging unit for taking an image of the combined beams forming on the unit and an aperture stop disposed in an optical path linking the interferometric objective lens, the light source, and the imaging unit together. The aperture stop is movable along an optical axis of the interferometric objective lens.

Interference measuring device and method of measurement using the same device

A focus detection unit to adjust a focal point of an image, of an object, formed by an optical system includes a first output section, a second output section, and a projection optical system. The first output section includes a first light modulation element configured to generate a first pattern image based on incident light and is configured to output the generated first pattern image. The second output section includes a second light modulation element configured to generate a second pattern image based on incident light and is configured to output the generated second pattern image. The projection optical system is configured to project the output first pattern image and the output second pattern image such that the output first pattern image and the output second pattern image have a predetermined positional relationship at an in-focus position of the optical system.

Focus detection unit and optical apparatus

A light interference measuring device comprises: a light sourcethat outputs light; a beam splitterthat causes the light output from the light source to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light that has passed through the reference optical path and reflection light that has passed through a measuring object arranged in the measurement optical path are combined; a reference mirrorthat is arranged in the reference optical path and that reflects light which is diverged into the reference optical path by the beam splitter; a stagethat is arranged in the measurement optical path and that has the work W placed thereon; an imaging partthat images an image in which the combined wave is formed; a reference mirror adjustment mechanism () that adjusts a posture of the reference mirror; and a control part that controls the reference mirror adjustment mechanism such that a reflecting surface of the reference mirrorcorresponds to a measurement surface of the work W, based on an image imaged in a condition where a work W is placed on the stage.

Light interference measuring device and program therefor

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Kanagawa, Japan

Tatsuya Nagahama