Sekisui Chemical Co., Ltd.

Tatsuya Matsuo

Yu Nagahara

Takaya Oshita

Yoshishige Takikawa

Naomichi Saito

Masaki Iwasaki

Naomichi Saitou

An irradiator includes: a piezoelectric transformer accommodated in a housing; a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer; and an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma. At least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening.

Irradiator and plasma apparatus

An irradiator includes: a first electrode to which a voltage is applied for generating a plasma; and a holding member holding the first electrode; wherein: the holding member has a first member and a second member that are in contact with each other to constitute an accommodation space accommodating the first electrode; and a contact surface between the first member and the second member includes a non-perpendicular contact surface that is non-perpendicular to an axis of the first electrode.

Holding member, irradiator, and plasma apparatus

Growing community of inventors

Kyoto, Japan

Tatsuya Matsuo