Tocalo Co., Ltd.

Other

Tokyo Electron Co., Ltd.

Tatsuya Hamaguchi

Nobuyuki Nagayama

Yoshio Harada

Kouji Mitsuhashi

Junichi Takeuchi

Hiroshi Sakurai

Kenichi Kagawa

Takema Teratani

Yusuke Yoda

Kazumi Tani

Yukimasa Saito

Shinya Miki

Shinichi Gomi

Kiyoshi Miyajima

Yoichiro Habu

Nobuyuki Tokyo Elect Yamanashi Co Ltd Nagayama

Kouji Tokyo Elect Yamanashi Co Ltd Mitsuhashi

Yasuo Miyake

Naoki Abe

The purpose of the present invention is to provide a culture container capable of preventing a concave meniscus without using a jig. In order to achieve this purpose, the present invention provides a culture container (A) provided with: a base () having a concave portion (); and a water-repellent layer () formed on an outer edge region () of the bottom () of the concave portion () and the inner circumferential surface () of the concave portion (). One of the surfaces of the water-repellent layer () is exposed to the space in the concave portion ().

Culture container and cell culturing method and cell observation method using culture container

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, AlOfilm formed on the undercoat as a middle layer and YOsprayed coating formed on the middle layer as a top coat.

Internal member for plasma-treating vessel and method of producing the same

A member for a semiconductor manufacturing apparatus comprises a steel substrate and a composite oxide film formed on a surface thereof and comprised of silicon oxide-aluminum oxide-chromium oxide and a sintering aid.

Members for semiconductor manufacturing apparatus and method for producing the same

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al O film formed on the undercoat as a middle layer and Y O sprayed coating formed on the middle layer as a top coat.

Plasma processing container internal member and production method thereof

Growing community of inventors

Kanagawa, Japan

Tatsuya Hamaguchi