Canon Kabushiki Kaisha

Kabushiki Kaisha Toshiba

Fuji Xerox Co., Ltd.

Tatsuya Arakawa

Kenichi Kobayashi

Steven T Jenkins

Mingji Lou

Hiroshi Hayashi

Kentaro Tomioka

Kohei Wada

Yukihiko Hata

Takahiro Yoshida

Mitsunori Shioi

Shigeyuki Matsumoto

Takafumi Yamamoto

Hiroki Orihara

Yohei Ito

An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Imprint apparatus and product manufacturing method

The imprint apparatus according to the present invention for forming a pattern by curing a resin in a state in which a pattern region in a mold is brought into contact with the resin on a shot region in a substrate, includes an element configured to adjust an irradiation region of light from a light source with which the substrate is irradiated, a measurement unit configured to measure a position of a mark formed in the mold, and a controller configured to control a position of the irradiation region with respect to the position of the mark in a plane parallel to a surface of the substrate, based on a measurement result of the position of the mark by the measurement unit.

Imprint apparatus and article manufacturing method

A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.

Adaptive feedforward and feedback control for controlled viscosity alignment and field-to-field related friction variation

The present invention provides an imprint method of forming a pattern on an imprint material on a substrate using a mold, comprising: performing preliminary curing of irradiating the imprint material with light to cure the imprint material to a first target hardness; and performing main curing of irradiating the imprint material with curing light to cure the imprint material to a second target hardness, wherein the preliminary curing includes a first process of irradiating the imprint material with first light to which the imprint material has first reaction sensitivity, and a second process of irradiating the imprint material with second light to which the imprint material has second reaction sensitivity lower than the first reaction sensitivity, and is controlled such that an end timing of the second process is later than an end timing of the first process.

Imprint method, imprint apparatus, and method of manufacturing article

An image forming apparatus includes: a plurality of paper supplying trays; an image forming unit; and a cover. The image forming apparatus further includes a cover opening/closing detecting unit that detects an operation for opening/closing the cover; a paper supplying tray opening/closing detecting unit that detects an operation for opening/closing the paper supplying tray; a paper jam detecting unit that detects a paper jam in at least one place in a paper transporting path; a paper jam release deciding unit that decides whether the paper jam in the detecting place is released or not after the confirmation of a detection; and a completion control unit that controls to complete a paper jam processing based on the decision that the paper jam in all of the places in the paper transporting path is released through the paper jam release deciding unit.

Image forming apparatus and computer readable medium

An electronic device is provided with an enclosure having a side wall in which vent holes are formed, a heat generator stored in the enclosure, a radiator disposed adjacent to the vent holes, a heat receiver thermally connected to the heat generator, a heat transmission member having one end thermally connected to the heat receiver and the other end thermally connected to the radiator, a fan disposed adjacent to the radiator to generate cooling air toward the radiator, and a seal member that seals a gap formed between the radiator and the side wall having the vent holes formed therein.

Growing community of inventors

Saitama, Japan

Tatsuya Arakawa