Mitsubishi Denki Kabushiki Kaisha

Tatsushi Higashi

Hiroaki Tosa

Yoshitaka Kamo

Akihiro Kuroda

There are provided an electric contact device for establishing reliable contact with ball contactors or strip contactors of a semiconductor device over contact areas of great area; a semiconductor device test socket using the electric contact device; a semiconductor module using the electric contact device; and a semiconductor device test method. A contact lead having a ring-shape or helical section is provided between a support pole and a movable pole. The movable pole is moved, to thereby bring the contact lead into an expanded state in which the diameter of the ring-shape or helical section becomes larger. A contactor is inserted into the ring-shape or helical section. The contact lead is then brought into a contacted state such that the diameter of the ring-shape or helical section becomes smaller, wherewith the contact lead is wrapped around the periphery of the contactor.

Electric contact device for establishing an improved contact with contactors of other device

Sample chips are tested after determining the chip layout on a semiconductor wafer so that one or plural ones of untested chips are surrounded by plural ones of the sample chips that adjoin the untested samples. A good/defective judgment on the untested chips is performed by using predicted good/defective judgment results that are statistically predicted based on results of the sample test and stored statistical data of a defect generation profile including address information that indicates defective chip locations. As a result, the good/defective judgment can be performed with high accuracy even in a case where defective chips are localized in a particular region on the wafer in a concentrated manner.

Test method of chips in a semiconductor wafer employing a test algorithm

A plurality of solder balls are arranged at a main surface of a BGA type semiconductor device. A test terminal is provided on the main surface adjacent to the solder ball. A contact pin of an IC socket is abutted against this test terminal. Accordingly, favorable electrical connection between a contact pin and a protruding external electrode can be achieved while suppressing deformation of the external electrode in testing a semiconductor device prior to mounting.

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Tokyo, Japan

Tatsushi Higashi