Sinfonia Technology Co., Ltd.

Tatsuru Ogawa

Yuki Ishihara

Atsushi Suzuki

Yuki Matsumoto

Shinpei Kogiso

Tatsuya Miura

Toshiya Sugimoto

A load port connected to a transport part includes: a base constituting a portion of a wall of the transport part; a stage on which a storage container is mounted; a stage driving mechanism configured to move the stage in a direction toward or away from the base; a door configured to be capable of opening/closing an opening of the base at a position facing a lid of the storage container mounted on the stage and to be capable of holding the lid disposed to face the opening in a state of closing the opening; a door driving mechanism configured to move the door between an opening position and a closing position; and a movement restricting part configured to restrict a movement of the stage in the direction away from the base by abutting against the stage.

Load port and method for opening/closing storage container

There is provided a load port, including: a frame including an opening via which a transfer target object is capable of passing in a substantially horizontal posture; a load port door configured to engage with a container door capable of opening and closing a loading/unloading port of a storage container including slots capable of accommodating the transfer target object in a multi-stage manner, and to open and close the opening of the frame; and a mapping mechanism configured to map information on an accommodation state including presence or absence of the transfer target object in each of the slots in the storage container via the opening and the loading/unloading port.

Load port

Growing community of inventors

Tokyo, Japan

Tatsuru Ogawa