Keyence Corporation

Tatsuro Homma

Hiroyuki Satoyoshi

Yuji Akishiba

Kimihiko Sugino

The optical displacement meter generates, from each position of a plurality of pixel rows in a U direction and a peak position in a V direction, a plurality of profiles of the X-Z cross section, and measures a three-dimensional shape of the measuring object based on the plurality of profiles acquired at different positions in the Y direction. The optical displacement meter determines, based on whether a profile exists in a blind spot region in which it is impossible to measure a height which occurs in a Y-Z cross section corresponding to an angle formed between a light projecting axis of a light projecting section and a light receiving axis of an image sensor based on a principle of triangulation, a part of the three-dimensional shape generated by a measuring unit as an erroneous detection value.

Optical displacement meter

To provide an optical-scanning-height measuring device capable of efficiently measuring a shape of a desired portion of a measurement object. Designation of a measurement point on an image of a measurement object S is received. Light emitted from a light emitting sectionis deflected by the deflecting section and irradiated on the measurement object S. The deflecting section is controlled to irradiate the light on a portion of the measurement object S corresponding to the measurement point. A deflecting direction of the deflecting section or an irradiation position of the light deflected by the deflecting section is detected. Height of the portion of the measurement object S corresponding to the measurement point is calculated on the basis of the deflecting direction of the deflecting section or the irradiation position of the light deflected by the deflecting section and the light reception signal output by the light receiving section.

Optical-scanning-height measuring device

To provide a three-dimensional measuring device capable of easily measuring a three-dimensional shape of a desired portion of a measurement object in a short time. Designation of a height measurement point and a dimension measurement portion by a user is received. An image of a measurement object S is acquired by an imaging section. Light emitted from the light emitting sectionis deflected by the deflecting sectionand irradiated on the measurement object S. Height of the portion of the measurement object S corresponding to the designated height measurement point is calculated on the basis of the light reception signal output from the light receiving section. A dimension of a portion of the measurement object S corresponding to the designated dimension measurement portion is calculated on the basis of the image acquired by the imaging section

Height and dimension measuring device that measures a height and dimension of a measurement object disposed in a measurement region

To provide an optical-scanning-height measuring device capable of quickly and highly accurately measuring the height of the surface of a measurement object while being compactly configured. In order to obtain interference light appropriate for calculation of height, an optical path length of the reference light is adjusted in the reference section. Movable sectionsandsupported by a supporting sectionmove on linearly extending two linear guides, whereby the optical path length of the reference light changes. When the optical path length of the reference light is adjusted, the movable sectionsandare moved in opposite directions each other.

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Osaka, Japan

Tatsuro Homma