Kurita Water Industries Ltd.

Nippon Paper Industries Co., Ltd.

Dainippon Screen Mfg. Co., Ltd.

Api Corporation

Mitsubishi Chemical Corporation

Tatsuo Nagai

Yoshimi Midorikawa

Hiroshi Morita

Akihito Ogino

Minoru Uchida

Tatsuyuki Kurihara

Takashi Sasaki

Hideki Kobayashi

Kaoru Hamada

Hiroaki Takahashi

Toyohide Hayashi

Kenji Hirai

Tadakazu Fukuchi

Yoshihide Kimura

Aya Kato

Junichi Ida

Junpei Natsui

Takashi Date

Mamoru Suga

Haruyoshi Yamakawa

Yoshimune Aosaki

Hiroaki Uchida

Shunichi Kanamori

Haruyoshi Kamakawa

Norihito Ikemiya

Yuzuki Yamamoto

A treatment deviceincludes: a treatment tank; an electrolytic cellincluding diamond electrodes continuous from a pipeincluding a circulation pump; and a pipesupplying from the electrolytic cellto the treatment tank. The treatment tankand the electrolytic cellare filled with sulfuric acid having a predetermined concentration; current is applied to the electrolytic cellto electrolyze the sulfuric acid and a persulfuric acid solution S is generated by electrolyzing the sulfuric acid; and the persulfuric acid solution S is supplied to the treatment tankthrough the pipe. Besides, inside the treatment tank, a PPS resin boardis vertically suspended in a state of being fixed to a fixtureA, and the PPS resin boardis treated by the persulfuric acid solution S.

Hydrophilization treatment method of polyphenylen sulfide resin

If incorporated in a cleaning system using persulfuric acid, the invention serves for continuous cleaning while increasing the persulfuric acid concentration adequately to ensure enhanced cleaning performance. The invention provides a feeding apparatus that feeds persulfuric acid to a cleaning apparatus. The cleaning system uses an electrolysis reactorthat regenerates the persulfuric acid solution by performing electrolytic reaction to produce persulfate ions from sulfate ions contained in the solution, and a circulation linethat circulates the persulfuric acid solution between the cleaning vesseland the electrolysis reactor. Configured as above, the invention can provides a feeding apparatus. The cleaning system comprises said configuration and a cleaning vesselthat cleans objectsusing a persulfuric acid solutionas cleaning fluid.

Sulfuric acid recycling type cleaning system and a sulfuric acid recycling type persulfuric acid supply apparatus

In order to selectively further etch silicon nitride by a cleaning liquid in cleaning of a substrate having silicon nitride and silicon oxide on the substrate, a cleaning liquid for use in cleaning of a substrate having silicon nitride and silicon oxide on the same substrate, at least a portion of one or both of the silicon nitride and the silicon oxide being exposed on the substrate, including phosphoric acid, electrolytic sulfuric acid produced by electrolysis and including persulfuric acid suitably having a concentration of 1.0 g/L to 8.0 g/L, and water is suitably brought into contact with the substrate at 165&#xb0; C. or higher and lower than a boiling point to selectively etch the silicon nitride on the substrate, thereby effectively etching the silicon nitride while etching of silicon oxide is suppressed to favorably clean a semiconductor substrate high in degree of integration having a pattern line width of 37 nm or less.

Substrate cleaning liquid and substrate cleaning method

A sulfuric acid electrolyte is produced efficiently as a functional solution and persulfuric acid produced by electrolysis is supplied efficiently to a use side while suppressing self-decomposition thereof. A functional solution supply system adapted to electrolyze a sulfuric acid solution to prepare a functional solution and supply the functional solution to a use side, comprises a storage tankfor storing the sulfuric acid solution, an electrolyzing apparatus (electrolytic cell) for electrolyzing the sulfuric acid solution, heating means (heater) for heating the sulfuric acid solution, cooling means (cooler) for cooling the sulfuric acid solution, a first circulation linefor returning the sulfuric acid solution discharged from the storage tankto the storage tankthrough the electrolyzing apparatus without passing through the heating means, a second circulation linefor returning the sulfuric acid solution introduced from the use side (cleaning machine) to the use side through the cooling means and the storage tankin this order without passing through the heating means, and a third circulation linefor returning the sulfuric acid solution introduced from the use side to the use side through the heating means (heater) without passing through the cooling means and the storage tank

Functional solution supply system

The present invention provides a thermosensitive recording medium with excellent color developing sensitivity, moist heat resistance and plasticizer resistance, as well as excellent heat resistance, background coloring, light resistance and the like in the printed image. A diphenyl sulfone derivative containing a hydroxyl group on one end and an alkoxy group on the other end has a higher melting point than the one containing hydroxyl groups on both ends. As a result, the thermosensitive recording medium obtained using the diphenyl sulfone derivative as the color developing agent in the thermosensitive color developing layer has excellent heat resistance. However the color developing sensitivity of the thermosensitive recording medium generally declines simultaneously, when a color developing agent with a high melting point is ordinarily used. The thermosensitive recording medium of the present invention that uses a combination of the diphenyl sulfone derivative and a specific phenol derivative in the thermosensitive color developing layer has a good color developing sensitivity and an improved balance among the properties such as moist heat resistance, plasticizer resistance and the like.

Thermosensitive recording medium

The present invention provides a thermosensitive recording medium, which has a satisfactory color developing sensitivity, an excellent general printability (surface strength) and an excellent anti-sticking property. The thermosensitive recording layer of the thermosensitive recording medium of the present invention contains an alkylketene dimer. Without forming a protecting layer, the thermosensitive recording medium of the present invention is superior in color developing sensitivity, general printability (surface strength) and anti-sticking property.

A wear of an electrode is prevented as much as possible, thereby efficiently electrolyzing a sulfuric acid solution and the like. An electrolysis method includes: passing an electrolytic solution through an electrolysis cell including at least a pair of an anode and a cathode; and supplying the electrodes with an electric power, so as to electrolyze the electrolytic solution, wherein a viscosity of the electrolytic solution is set in a range in response to a current density upon the electric power supply to carry out the electrolysis. The viscosity of a sulfuric acid solution as the electrolytic solution is equal to or less than 10 cP when the current density is equal to or less than 50 A/dm, the viscosity of the sulfuric acid solution is equal to or less than 8 cP when the current density is from more than 50 to 75 A/dm, and the viscosity of the sulfuric acid solution is equal to or less than 6 cP when the current density is from more than 75 to 100 A/dm. Particularly when a highly-concentrated sulfuric acid solution is electrolyzed at a high current density using diamond electrodes, the electrolysis process can be carried out highly efficiently while a wear of the electrode is reduced.

Electrolysis method

A substrate processing apparatus and a substrate processing method, with which a resist can be removed satisfactorily from the substrate and a processing solution used for removing the resist can be recycled, are provided. The substrate processing apparatus includes: a substrate holding means holding a substrate; a peroxosulfuric acid generating means generating a peroxosulfuric acid using sulfuric acid; a mixing means mixing the peroxosulfuric acid generated by the peroxosulfuric acid generating means and sulfuric acid of higher temperature and higher concentration than the sulfuric acid used in the peroxosulfuric acid generating means; and a discharging means discharging, toward the substrate held by the substrate holding means, the mixed solution of the peroxosulfuric acid and the sulfuric acid mixed by the mixing means as a processing solution for removing a resist from the substrate.

Substrate processing apparatus and substrate processing method

The present invention is a thermally sensitive recording medium containing a thermally sensitive color developing layer containing a colorless or pale colored basic leuco dye and a color-developing agent as the main components on a substrate, wherein the thermally sensitive recording layer contains an acrylic polymer obtained by the copolymerization of an alkyl acrylate, alkyl methacrylate and vinylsilane as monomer components and a colloidal. Further, the present invention is a thermally sensitive recording medium, wherein the colloidal silica possesses a chain structure.

Heat-sensitive recording material

In the multi colored thermally sensitive recording medium, at least one kind of dye precursor is contained in complex fine particles which contain dye precursor and polymer of multi valence isocyanate compound, further contain 4,4'-diisocyanate-3,3&#x2032;-dimethyl-1,1&#x2032;biphenyl and/or polymethylene.polyphenyl.polyisocyanate.

Multicolored thermally recording medium

Growing community of inventors

Tokyo, Japan

Tatsuo Nagai