Mitutoyo Corporation

Tatsuo Itabashi

Masaki Tomiya

Soichi Sato

Nobuhisa Nishioki

A lattice interference-type displacement detection device including a scale having a penetration-type diffraction lattice formed on one side thereof, and an optical system positioned adjacent to the diffraction lattice and remote from the scale. The optical system includes a light source which emits a light beam along a light source optical path, a light beam divergence arrangement for branching the light beam into first and second divergence beams along first and second optical paths, respectively, and for causing the first and second divergence beams to be incident at a diffraction point on the diffraction lattice, a light beam mixing arrangement for generating first and second mixing light beams from a first group of diffraction light beams generated at the diffraction point, and an arrangement for converting the first and second mixing light beams into respective electrical signals. The scale also includes a light reflection surface remote from the optical system with respect to the diffraction lattice. The light reflection surface reflects the first group of diffraction light beams generated at the diffraction point to the light beam mixing arrangement along third and fourth optical paths, respectively. The optical system is arranged so that a second group of diffraction light beams generated at the diffraction point are not reflected back along the light source optical path to the light source. The light beam divergence arrangement and light beam mixing arrangement are constructed of a single prism.

Apparatus wherein diffracted light does not return to the source

A displacement sensor is disclosed, which permits a semiconductor laser to be used as a light source with less thermal effects thereof. A spindle 18 with a scale 32 mounted thereon is disposed in a housing 11 or displacement. In the housing are also provided a semiconductor laser 35 for projecting a laser beam onto the scale and a transducer 36 for converting light form the scale into an electric signal. A heat insulation arrangement 41 is provided between the semiconductor laser 35 and the scale 32 to prevent transmission of heat from the semiconductor laser 35 to the scale 32. A heat radiation arrangement for radiating heat from the semiconductor laser 35 to the outside of the housing 11 is mounted in the housing 11. Thus, thermal effects of the semiconductor laser 35 on the scale 32 are reduced, and thus the accuracy of measurement is improved.

Displacement sensor including a heat insulating member partitioning the

A grating-interference type displacement meter apparatus is disclosed wherein a convex lens or a concave mirror is disposed such that a focal point thereof is placed on a refraction plane or a diffraction plane of a diffraction grating, or wherein zeroth-order beams transmitted through the diffraction grating are reflected back in the same direction by a rectangular prism or a triangular prism for reentrance thereof onto the diffraction grating. Hereby, a plurality of optical beams produced by the diffraction grating are directed to propagate parallely to directions of propagation thereof defined in its design.

Growing community of inventors

Kawasaki, Japan

Tatsuo Itabashi