Hitachi, Ltd.

Hitachi-High-Technologies Corporation

Tatsuo Hariyama

Masahiro Watanabe

Atsushi Taniguchi

Kenji Maruno

Minoru Yoshida

Shigeru Serikawa

Hideaki Sasazawa

Hiroaki Kasai

Yuta Urano

Yasuhiro Yoshitake

Hirokazu Matsumoto

Tetsuya Matsui

Masayuki Kobayashi

Akio Yazaki

Kazushi Yoshimura

Takehiro Tachizaki

Kiyoshi Takamasu

According to the present invention, a measured distance is corrected in accordance with change in the surrounding environment. A distance measurement system includes: a first light-receiving unit configured to irradiate an object with one part of a split light beam as assessment light, and receive light reflected by the object to detect a target assessment beat signal; a second light-receiving unit configured to guide the other part of the split light beam as reference light to a reference optical path serving as a distance reference, and receive the reference light that has passed through the reference optical path to detect a reference optical path assessment beat signal; a distance measurement unit configured to measure a distance to the object on the basis of the target assessment beat signal and the reference optical path assessment beat signal; a temperature sensor configured to assess a temperature in the periphery of the reference optical path; and a correction unit configured to correct the measured distance on the basis of the assessed temperature.

Distance measurement system and distance measurement method

A distance measuring device includes a light emitting unit that outputs a measurement light, a first polarization state control unit that controls a polarization state of the measurement light output from the light emitting unit, a second polarization state control unit that controls the polarization state of the measurement light of which a polarization state is controlled by the first polarization state control unit, and an optical path switching element that selects an emission direction of the measurement light of which a polarization state is controlled by the second polarization state control unit, in which the second polarization state control unit controls the polarization state of the measurement light so that the measurement lights are emitted from the optical path switching element in a plurality of the emission directions, and the optical path switching element receives a reflected light obtained by reflecting the emitted measurement light by an object.

Distance measuring device, distance measuring method, and three-dimensional shape measuring apparatus

A shape of an object is measured with a high degree of accuracy. A shape measurement system comprises: a distance measuring head for irradiating an object with light and receiving light reflected from the object; a distance measuring device for generating a distance detection waveform on the basis of the reflected light; and a control device for analyzing the distance detection waveform and calculating a measured distance value to the object. The shape measurement system is characterized in that the control device calculates a feature amount of the distance detection waveform and performs at least one of a process of correcting an error in the measured distance value by substituting the feature amount into a correction formula and a process of performing a confidence weighting of an error in the measured distance value by substituting the feature amount into a confidence weighting formula.

Shape measuring system and shape measuring method

Provided is a shape measurement system in order to perform three-dimensional measurement corresponding to a measurement object having various shapes, which includes a measurement probe, a probe tip, and a processor. The probe tip includes an optical element that is configured to irradiate an object with measurement light and a cylindrical unit that is configured to lock the optical element. The processor is configured to calculate an optical path length from the optical element to an object based on reflected light of the measurement light with which the object is irradiated; and calculate a three-dimensional shape of the object based on the input information and the optical path length.

Shape measurement system, probe tip unit, and shape measurement method

Provided is a shape measurement system in order to perform three-dimensional measurement corresponding to a measurement object having various shapes, which includes a measurement probe, a probe tip unit, and a calculation unit. The probe tip unit includes an optical element that is configured to irradiate an object with measurement light, a fixing mechanism that is configured to fix to the measurement probe so as to be detachable and replaceable, and a cylindrical unit that is configured to lock the optical element and is provided with the fixing mechanism.

An object is to provide a technology capable of realizing miniaturizing of a measurement unit in a distance measuring device. The distance measuring device including a light emitting unit that outputs measurement light, a polarization state control unit that controls polarization of the measurement light output from the light emitting unit, and an optical path switching element that selectively emits the measurement light controlled by the polarization state control unit, in which the polarization state control unit controls the polarization so as to emit the measurement light in a plurality of directions from the optical path switching element, and the optical path switching element receives reflected light with respect to an object of the measurement light emitted from the optical path switching element, the reflected light being used to measure a distance to the object.

Distance measuring device and three-dimensional shape measuring apparatus

An object of the present invention is to provide a compact and highly-accurate three-dimensional shape measurement apparatus. The three-dimensional shape measurement apparatus according to the present invention causes a part of a measurement light to proceed in a direction which is different from a direction with respect to a subject as an angle measurement light, and detects a rotation angle using the angle measurement light.

Three-dimensional shape measuring apparatus, three-dimensional shape measuring probe

The purpose of the present invention is to provide a shape measuring device and method, wherein the separation of light from one distance sensor increases measurement precision without increasing the size of the device. The present invention provides 'a shape measuring device comprising: a distance sensor that radiates a laser toward a measurement target and detects the reflected light so as to calculate the distance to a measurement point; a separation unit that separates the light from the distance sensor into a plurality of light rays; a rotation unit that rotates the distance sensor and the measurement target relative to each other; and a data processing unit that integrates measurement results obtained from the distance sensor for the distances to a plurality of measurement points.'

Shape measuring method and device

The purpose of the present invention is to provide a shape inspection device that improves, without making the device larger, durability and measurement precision by measuring a plurality of points with a single distance sensor. The present invention provides a shape measuring device that measures the shape of an object to be measured and that comprises: a distance sensor that calculates the distance to the object to be measure by irradiating a measurement light toward the object to be measured and detecting the reflected light from the object to be measured; a separating unit that separates the measurement light from the distance sensor into a plurality of measurement light rays to be irradiated onto a plurality of measuring points; and a selecting unit that selects, from the plurality of measurement light beams separated by the separating unit, the measurement light to irradiate the object to be measured.

A multi-point measuring apparatus of FBG sensor has an optical fiber, a wide-band wavelength light source, a light-source side light modulator for controlling time of a light entering into the optical fiber, among lights from this light source, a detector side light modulator for controlling time, during which a reflection light from a diffraction grating of the optical fiber penetrates through, a wavelength shift amount calculator for processing a signal obtained through detection of the reflection light from this light modulator, a temperature/distortion calculator for calculating an amount of deformation of a target to be measured from a result of this calculator, and a display portion for displaying information relating to the amount of deformation of this target to be measured.

Multi-point measuring apparatus and method of FBG sensor having multiple delaying fibers

Disclosed is a distance measuring device using an optical comb. In order for the absolute distance to an object to be measured which has a surface with low reflection ratio or a scattering surface and is approximately 10 m apart, to be easily measured with accuracy of 0.1 mm or more using an optical and contactless method, the distance measuring device which measures the distance to the object to be measured is configured such that the distance to the object to be measured is measured by comparing the phase of the beat signal between a light source and a plurality of CW lasers which are reflected or scattered by the object with the phase of the beat signal between the light source and a plurality of CW lasers prior to being irradiated onto the object.

Distance measuring device and distance measuring method

The invention has a function of preparing a data base for a relation between a defect shape and an arrangement for the optical system capable of detecting the shape at high sensitivity and automatically adjusting the arrangement for the optical system. As the method of preparing the data base, a method of using optical simulation or an experimental method of using a sample having an optical shape is applied. A pinhole position and a beam size are adjusted automatically so as to attain the optimal arrangement for the optical system to an inputted defect shape based on the data base.

Disk surface inspection apparatus, inspection system thereof, and inspection method thereof

There is provided a defect inspecting apparatus, which includes an irradiating optical system of irradiating a light beam on a surface of a face plate of a disk mounted on a stage to scan the surface of the face plate, a light-receiving optical system of receiving specular reflection light that has transmitted a shading filter with a shading difference that changes an amount of the specular reflection light from the face plate resulting from the light beam irradiated on the disk, and a processing unit of identifying defects on the surface of the face plate from the change in amount of the specular reflection light that has transmitted a filter, so that a size and a height of the defect can be measured with high accuracy when irregular defects are determined, which is not easily achieved by a conventional lens effect.

Surface defect inspecting apparatus with defect detection optical system and defect-detected image processing

The present invention relates to an apparatus for detecting defects on a disk surface which projects light on the disk surface by a light transmitting system, receives specula reflection light and scattered light by a light receiving system, exposes defects by performing a two-dimensional frequency filter process on a signal, and performs a defect determination process to extract a linear-shaped isolative defect candidate. Next, the present invention performs a periodicity determination process to classify and detect the periodically generated linear and circular arc defects and the isolatively generated linear and circular arc defects.

Growing community of inventors

Tokyo, Japan

Tatsuo Hariyama