Hitachi, Ltd.

Samsung Electronics Co., Ltd.

Hitachi-High-Technologies Corporation

Hitachi Maxell, Limited

Hitachi High-Technologies Co.

Tatsumi Hirano

Shohei Terada

Takashi Naito

Hiroki Yamamoto

Tetsuo Nakazawa

Kazutoshi Kaji

Jong-bong Park

Gyeong-su Park

Se-ahn Song

Koichi Watanabe

Nobuyuki Inaba

Fumiyoshi Kirino

Takashi Namekawa

Teruaki Takeuchi

Yoshifumi Taniguchi

Satoshi Matsunuma

Yasutaka Suzuki

Mitsutoshi Honda

Akira Yano

Yuzo Kozono

Hiromitsu Seino

Yasuichiro Watanabe

In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).

Transmission electron microscope having electron spectrometer

A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.

Sample transfer device and sample transferring method

A sample holder capable of holding samples is provided which comprises

Sample holder for electron microscope

A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the measurement conditions. Disclosed is an evaluating apparatus that implements the above evaluating method.

Method and apparatus for evaluating thin films

A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1&#x2013;5 nm or 6&#x2013;10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.

Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same

An amorphous magnetic recording medium comprising a substrate and an amorphous magnetic layer, where a magnetic domain formation-controlling layer comprising a main phase and 1 to 3 kinds of discrete spherical isolating phases arranged horizontally in lines in the main phase or 1 to 3 kinds of discrete spherical phases vertically stacked one upon another in the main phase is formed on the top side or the bottom side directly or through at least one of other layers to bring the amorphous magnetic layer into a finer magnetic domain structure, can satisfy high density recording.

Amorphous magnetic recording medium, process for producing the same and magnetic recording and reproduction apparatus

A magnetic recording medium comprising a substrate , an inorganic compound layer which works as a shielding layer, a magnetic layer and a protective layer which are laminated on said substrate; wherein said inorganic compound layer comprises column-like crystal particles and amorphous grain boundary phases isolating said particles , wherein said magnetic layer has magnetic particles arranged regularly and epitaxially grows on said inorganic compound layer , and wherein the grain sizes and the standard grain size deviation of magnetic particles of said magnetic layer reflect those of said inorganic compound layer

Magnetic recording medium, a manufacturing method thereof, and a magnetic recording unit using thereof

Growing community of inventors

Hitachinaka, Japan

Tatsumi Hirano