Mitsui Chemicals, Inc.

Tatsuma Morokuma

Akio Kikkawa

Hiromi Hayashida

An electrode for electrolyzing an electrolyte comprising an ammonium fluoride (NH F)-hydrogen fluoride (HF)-containing molten salt and having a composition ratio (HF/NH F) of 1 to 3 to prepare a nitrogen trifluoride (NF ) gas and an electrolyte for use in the preparation of NF gas, and a preparation method of the NF gas by the use of the electrode and the electrolyte. The electrode comprises nickel having 0.07 wt % or less of Si content and containing a transition metal other than nickel. The electrolyte also contains a transition metal other than nickel.

Electrode and electrolyte for use in preparation of nitrogen trifluoride gas, and preparation method of nitrogen trifluoride gas by use of them

A process for producing high-purity nitrogen trifluoride gas by molten salt electrolysis using a nickel electrode and ammonium hydrogenfluoride as an electrolyte, wherein carbon element constituting impurity gases entrained in a crude gas, among impurities in the nickel electrode as an anode is controlled to an amount of 400 wt ppm or less. The process allows high-purity nitrogen trifluoride gas to be produced with a purity of 4N or higher.

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Yamaguchi, Japan

Tatsuma Morokuma