Kuroda Precision Industries Ltd.

Tatsuhito Inouchi

Kaoru Naoi

Yoichi Ishizaki

Masahiro Iwasaki

Koichi Sekiguchi

In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.

Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same

In a parallel slider device, the two sliders are allowed to move in a smooth manner without interfering with each other. A same position command is given to a front servo controller for a front linear servo motor and a rear servo controller for a rear linear servo motor, and the front servo controller and the rear servo controller are provided with mutually different control gains.

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Ichihara, Japan

Tatsuhito Inouchi