Average Co-Inventor Count = 3.43
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Screen Holdings Co., Ltd. (2 from 1,111 patents)
2 patents:
1. 11495476 - Substrate treating apparatus
2. 11387121 - Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate