Tokyo Ohka Kogyo Co., Ltd.

Tatsuhiro Mitake

Atsushi Matsushita

Yoshihiro Inao

Atsushi Miyanari

Yasushi Fujii

A method for forming a release layer which lies between a substrate and a supporting member and has a property that changes when the release layer absorbs light coming through the supporting member, by carrying out plasma CVD with a high-frequency power that is set so as to be higher than a power at which a mode jump occurs.

Method of manufacturing multilayer body, method of processing substrate, and multilayer body

A method of manufacturing a laminate including a substrate, a support, and a release layer, the method including a preliminary treatment process of increasing temperatures of the support carried into a reaction chamber and the inside of the reaction chamber by a plasma treatment, and a release layer forming process of supplying a source gas serving as the release layer into the reaction chamber after the preliminary treatment process to form the release layer on the support.

Method of manufacturing laminate

A method of cleaning a support plate according to which, while no waste solution is produced after cleaning the support plate, the support plate can be treated at low cost. The method of cleaning the support plate includes the step of removing an organic substance adhered to the support plate by putting the support plate in contact with oxygen plasma.

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Kawasaki, Japan

Tatsuhiro Mitake