Shizuoka University

Omron Corporation

Kabushiki Kaisha Saginomiya Seisakusho

Aoi Electronics Co., Ltd.

Tatsuhiko Sugiyama

Gen Hashiguchi

Masato Suzuki

Hisayuki Ashizawa

Hiroyuki Mitsuya

Hiroki Hayashi

Kazunori Ishibashi

Masatoshi Oba

Hiroshi Imamoto

Akito Mori

An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device

An electrostatic induction conversion device includes: an input-side electrostatic actuator that includes a first fixed electrode and a first movable electrode facing the first fixed electrode; and an output-side electrostatic actuator that includes a second movable electrode linked to the first movable electrode via a link mechanism member, which increases or decreases a displacement quantity representing an extent of displacement occurring at the first movable electrode, and a second fixed electrode facing the second movable electrode, wherein: a permanently charged layer is deposited on an electrode surface either on a movable electrode side or on a fixed electrode side, at the input-side electrostatic actuator and the output-side electrostatic actuator.

Electrostatic induction conversion device and DC-DC converter

Growing community of inventors

Hamamatsu, Japan

Tatsuhiko Sugiyama