Right Mfg. Co., Ltd.

Tatsuhiko Nagata

Tetsurou Nishida

Eishi Aizawa

Masaru Seki

Takehiko Yoshimura

Yoshinori Cho

A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to spaces between adjacent wafers being stored, are a driving unit for extending the nozzle unit to a door opening portion.

Load port

An irradiation field limiting device includes a plurality of aperture leaves arranged in a thickness direction, a flexible linear member secured to a thick portion of the aperture leaf, a driver section which drives the linear member a specific amount, and the like. One end of the linear member is secured to an aperture leaf through a connection section tangentially to the outer arc of the aperture leaf, and the other end is connected with a slider provided in a driver section. The slider is connected with a driving source through a connection portion and moves along an axial direction of a drive shaft inserted into a base accompanying rotation of the drive shaft. A load accompanying the movement of the slider is directly transmitted to the linear member, and the aperture leaf is driven a specific amount due to the load.

Device for limiting field on which radiation is irradiated

The present invention provides an eye accommodation function state measurement device which places only a small burden on the subject, allows confirmation of an intermediate measurement result, and is more conveniently used. The eye accommodation function state measurement device disposes an image at a plurality of positions by using an image moving mechanism, and measures the accommodation function state of the subject's eye at each position. The eye accommodation function state measurement device includes a control section () which provides a measurement suspension period (Sto S) in which the measurement is suspended. In the measurement suspension period, the eye accommodation function state measurement device calculates the eye accommodation function state (S), displays the intermediate measurement result of the eye accommodation function state (S), or transmits data from the control section () to an external storage section () (S).

Eye accommodation function state measurement device and eye accommodation function state measurement method

A pod cover removing-installing apparatus can open and close any covers for a variety of pods made by a various manufactures, can satisfy an allowable distortion error capable of being normally operated even if conditions such as temperature, humidity, and can remove and install the cover without causing it to collide with any one of the parts of the pods. The pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, the inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings. The apparatus is provided with positioning pins for positioning the cover, a fine adjustment mechanism for fine adjustment of the positioning pins, and a holding mechanism for holding the position of the cover engaging the positioning pins.

Pod cover removing-installing apparatus

The present invention provides a compound device having an eye refractive power measurement function and an eye accommodation function state measurement function, preventing an increase in size and cost in comparison with a known eye refractive power measurement device, and convenient for the operator even when the measurement type is changed. An eye refractive power measurement device includes a measurement type select switch () which selects one of at least two types of measurements including normal refractive power measurement, which measures the refractive power of the subject s eye including spherical power, cylinder power, and astigmatism axis, and eye accommodation function state measurement, which determines a change in the refractive power of the subject s eye for high-frequency components. A refractive power measurement section () is a multiple meridian direction refractive power measurement section which can measure the eye refractive power in two or more meridian directions. The multiple meridian direction refractive power measurement section measures the refractive power in at least two meridian directions when performing the normal refractive power measurement. The multiple meridian direction refractive power measurement section measures the refractive power in one predetermined meridian direction when performing the eye accommodation function state measurement.

Eye refractive power measurement device

A pod cover removing-installing apparatus can open and close any covers for a variety of pods made by a various manufactures, can satisfy an allowable distortion error capable of being normally operated even if conditions such as temperature, humidity, and can remove and install the cover without causing it to collide with any one of the parts of the pods. The pod cover removing-installing apparatus to remove and install a coverfor an openingof a pod, of which the inside is kept extremely clean, by causing the cover to engage a doorfor an openingof a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings. The apparatus is provided with positioning pinsfor positioning the cover, a fine adjustment mechanismfor fine adjustment of the positioning pins, and a holding mechanismfor holding the position of the coverengaging the positioning pins

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Tokyo, Japan

Tatsuhiko Nagata