Ebara Corporation

Toyota Jidosha Kabushiki Kaisha

The University of Tokyo

Kabushiki Kaisha Toshiba

Taro Takahashi

Yuta Suzuki

Mitsuo Tada

Hiroaki Shibue

Akihiko Ogawa

Shinpei Tokunaga

Yoichi Kobayashi

Atsushi Abe

Akira Nakamura

Katsuhide Watanabe

Shinrou Ohta

Hiroto Yamada

Motohiro Niijima

Naoki Mima

Tetsuji Togawa

Masahiro Hatakeyama

Hiroyuki Shinozaki

Hiroshi Fujimoto

Seiji Katsuoka

Koichi Fukaya

Yasumasa Hiroo

Yasunari Suto

Akira Hatano

Atsushi Takahashi

Hiroshi Ota

Atsushi Shigeta

Takashi Izuo

Itsuki Kobata

Kiyoshi Matsumoto

Nobuyuki Takada

Isao Shimoyama

Noburu Shimizu

Kenji Terao

Yutaro Ishida

Yusuke Kosaka

Toshiki Miyakawa

Masaru Ishikawa

Tatsuya Kohama

Hidetaka Nakao

Hiromitsu Watanabe

Shinro Ohta

Mitsunori Sugiyama

Tomoyuki Takahata

Eisaku Hayashi

Yuji Yagi

Katsumi Kusama

Yasumitsu Kawabata

Yasuhiro Terakado

Hideyuki Isozaki

Yoshihiro Kuroki

Kenji Inukai

Akiyuki Hasegawa

Shigeyuki Furuya

An information processing device is provided that includes an acquisition unit that acquires information indicating a force generated between a first tool and an object in a trial motion using the first tool by a robot, and an estimation unit that estimates information of executing a specific task using the first tool based on the information acquired by the acquisition unit and information indicating a force generated between a specific tool and the object in the specific task using the specific tool.

Information processing device, information processing method, and storage medium

A polishing apparatus for performing polishing between a polishing pad and a semiconductor wafer disposed to face the polishing pad includes a polishing table for holding the polishing pad, a top ring for holding the semiconductor wafer, a swing arm for holding the top ring, and a swing shaft motor for causing the swing arm to swing. The polishing apparatus further includes an arm torque detection section that detects an arm torque imparted to the swing arm when the swing arm is swinging in a predetermined angle range, and an endpoint detection section that detects a polishing endpoint indicating the end of polishing on the basis of the arm torque detected by the arm torque detection section.

Polishing apparatus and polishing method

An end point detection method is provided for detecting and end point based on a drive current supplied to a drive unit that rotates and drives one of a polishing table and a holding unit. The end point detection method includes: a step (S) of determining whether a polishing condition of a polishing process to be executed coincides with a preset specific polishing condition; a step (S) of adjusting a current control parameter in a drive control unit that controls the drive current, the current control parameter related to a change in the drive current with respect to a change in a driving load of the drive unit, if it is determined that the polishing condition coincides with the specific polishing condition; and a step (S) of detecting the drive current supplied to the drive unit based on the adjusted current control parameter.

End point detection method, polishing apparatus, and polishing method

There is provided a detection signal processing circuit and a detection signal processing method for an eddy current sensor that are less easily influenced by a change in ambient environment than conventional technologies. A detection signal processing apparatus includes a converter configured to convert a first analog signal output by a detection coil into a first digital signal, a converter configured to convert a second analog signal output by a dummy coil into a second digital signal, and a detector which is a digital signal processing circuit configured to detect the first digital signal and the second digital signal.

Detection signal processing apparatus and detection signal processing method for eddy current sensor

A control device that controls an ultraviolet emission device such that the inside of a vehicle is sterilized is provided. The control device includes a vehicle state acquiring unit configured to acquire a state of the vehicle, a determination unit configured to determine whether a person is present inside of the vehicle based on the state of the vehicle, and a control unit configured to control the ultraviolet emission device with reference to a result of determination of whether a person is present inside of the vehicle.

Control device, in-vehicle sterilization system, control method, and control program

An eddy current sensor has an exciting coil and a detection coil. A holding circuit holds reference data indicating a characteristic of an output signal output from the detection coil at a reference state and outputs the reference data at a state other than the reference state. A pseudo signal generating circuit generates and outputs a balance coil pseudo signal corresponding to the output signal output from the detection coil at the reference state from the reference data output from the holding circuit. A bridge circuit, at the state other than the reference state, receives the output signal output from the detection coil and the balance coil pseudo signal and outputs a bridge output signal corresponding to a difference between the output signal and the balance coil pseudo signal as a bridge output signal.

Output signal processing apparatus for eddy current sensor

A current detection section detects a current value of a swing shaft motorand generates a first output. A first processing section obtains a contact pressure corresponding to the first output from the first output using first data indicating a correspondence relationship between a contact pressure applied to a semiconductor wafer by a top ring and the first output. A second processing section obtains a second output corresponding to a contact pressure obtained by the first processing section using second data indicating a correspondence relationship between the contact pressure obtained by the first processing section and the second output.

An eddy current sensor assembly includes an eddy current sensor and an output signal processing circuit that processes an output signal from the eddy current sensor. The output signal processing circuit includes a mixer circuit that accepts the output signal and a signal of the predetermined frequency as input, multiplies the two signals received as input, and outputs an output signal obtained by the multiplication, and a low-pass filter that accepts the output signal output by the mixer circuit as input, cuts a high-frequency signal included in the output signal received as input, and outputs at least a direct-current (DC) signal.

Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor

A polishing apparatus capable of acquiring accurate film thickness distribution information is disclosed. The polishing apparatus includes a polishing table, a plurality of film thickness sensors, and a controller. The controller analyzes film thickness distribution information of a substrate while identifying a notch position of the substrate based on the measured film thickness information, and outputs visualization information of the film thickness distribution with the notch position as a reference position.

Polishing apparatus, polishing method and method for outputting visualization information of film thickness distribution on substrate

The eddy current sensor for measuring the film thickness of a conductive film formed on a substrate includes a core made of a magnetic material that has a base portion, and outer legs provided to the base portion at both end portions in a first direction of the base portion respectively, an excitation coil that is arranged on the core and forms an eddy current in the conductive film, and a detection coil that is arranged on the core and detects the eddy current formed in the conductive film. The length of the base portion in the first direction is not less than the length of the base portion in a second direction that is substantially orthogonal to the first direction.

Eddy current sensor

A torque estimation method according to the present disclosure estimates a value of shaft torque of a rotary motion transmitting mechanism. The torque estimation method includes: a step of specifying a maximum value of a torsion angle between an input shaft and an output shaft from the time when a measurement value of the torsion angle is zero to the time when the value of the shaft torque is estimated; and a step of specifying the maximum value of the torsion angle. In the step of specifying the maximum value of the torsion angle, the maximum value of the torsion angle is specified based on a difference between the measurement value of the torsion angle subjected to low-pass filter processing at a first cutoff frequency and the measurement value of the torsion angle subjected to low-pass filter processing at a second cutoff frequency.

Torque estimation method, torque estimation device, and torque estimation program

It is possible to effectively prevent lowering of work efficiency while stabilizing an operation of a robot or the like. A torque estimation system estimates friction torque of a rotation mechanism. The torque estimation system inclues angular velocity detecting means for detecting an angular velocity of the rotation mechanism, and limit value setting means for setting an upper limit value and a lower limit value according to the angular velocity of the rotation mechanism detected by the angular velocity detection means, the upper limit value and the lower limit value limiting an upper limit and a lower limit, respectively, of the friction torque of the estimated friction torque.

Torque estimation system, torque estimation method, and program

A magnetic element for strengthening a magnetic field formed in an object and an eddy current sensor using the magnetic field are provided. The eddy current sensor includes a bottom face portion which is a magnetic body, a magnetic core portion provided at the middle of the bottom face portion and a peripheral wall portion provided on the periphery of the bottom face portion. The eddy current sensor further includes an excitation coil disposed on an outer periphery of the magnetic core portion and capable of generating a magnetic field and an excitation coil disposed on an outer periphery of the peripheral wall portion and capable of generating a magnetic field.

Magnetic element and eddy current sensor using the same

An external force estimation device is configured to estimate an external force acting on a motor. The external force estimation device includes a processor. The processor is configured to: calculate an output torque of the motor by using a value of a current supplied to the motor; estimate an inertia torque of the motor by using rotational position information of the motor; estimate a first friction torque of the motor by using the rotational position information of the motor; perform temperature-based correction for the first friction torque by using temperature information of the motor; and estimate the external force by subtracting the inertia torque and the first friction torque after the temperature-based correction from the output torque.

External force estimation device, external force estimation method, and non-transitory computer-readable storage medium

Growing community of inventors

Tokyo, Japan

Taro Takahashi