Average Co-Inventor Count = 2.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Nikon Corporation (9 from 8,898 patents)
2. Niko Corporation (1 from 7 patents)
10 patents:
1. 10222708 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
2. 9857692 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
3. 9348238 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
4. 9298108 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
5. 9223230 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
6. 9223231 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
7. 8576379 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
8. 8072578 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
9. 8059260 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
10. 8054465 - Position measurement method