Oerlikon Surface Solutions Ag, Pfaffikon

Tariq Rasa

Jörg Vetter

Georg Erkens

Jones Alami

The invention relates to a physical vapor deposition coating device (), comprising a process chamber () with an anode () and a consumable cathode () to be consumed by an electrical discharge for coating a substrate located within the process chamber (). The coating device () further includes a first electrical energy source () being connected with its negative pole to said consumable cathode (), and a second electrical energy source () being connected with its positive pole to said anode (). According to the invention, a third electrical energy source () is provided being connected with its negative pole to a source cathode () which is different from the consumable cathode (). In addition, the invention relates to a physical vapor deposition method for coating a substrate.

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Aachen, Germany

Tariq Rasa