Intel Corporation

Tarek A Ibrahim

Srinivas V Pietambaram

Brandon C Marin

Kristof Darmawikarta

Rahul N Manepalli

Robert Alan May

Rahul Jain

Steve S Cho

Jason M Gamba

Debendra Mallik

Sanka Ganesan

Ram S Viswanath

Jeremy D Ecton

Edvin Cetegen

Xavier Francois Brun

Sergio Antonio Chan Arguedas

Nicholas S Haehn

Manish Dubey

Nicholas Neal

Thomas Heaton

Jacob Vehonsky

Antariksh Rao Pratap Singh

Robert L Sankman

Omkar G Karhade

Nitin A Deshpande

Pooya Tadayon

Leonel R Arana

Gang Duan

Wei-Lun Kane Jen

Bai Nie

Benjamin Duong

Srinivas Venkata Ramanuja Pietambaram

Yonggang Li

Yikang Deng

Sheng C Li

Sai Vadlamani

Suddhasattwa Nad

Dingying David Xu

Sri Chaitra Jyotsna Chavali

Prithwish Chatterjee

Vipul V Mehta

Xiaoqian Li

Bharat P Penmecha

Marcel Arlan Wall

Haobo Chen

Haifa Hariri

Aleksandar Aleksov

Telesphor Kamgaing

Kemal Aygun

Ravindranath Vithal Mahajan

Zhiguo Qian

Nasser A Kurd

Zhichao Zhang

Sri Ranga Sai Boyapati

Krishna Bharath

Weng Hong Teh

Mitul Bharat Modi

Javier Soto Gonzalez

Andrew James Brown

Mohamed A Abdelmoneum

Brent R Carlton

Daniel N Sobieski

Changhua Liu

Darko Grujicic

Yosuke Kanaoka

Sarah Kay Haney

Hongxia Feng

Jason A Mix

Whitney Michael Bryks

Eduardo Alban

Karumbu Meyyappan

Hari Mahalingam

Jieying Kong

Eric J M Moret

Eric J Moret

Bohan Shan

Parshuram Balkrishna Zantye

Sarah Blythe

Valery Ouvarov-Bancalero

Stephen Smith

Chad E Mair

Sarah Shahraini

Yiyang Zhou

Michael Garelick

Robin Shea McRee

Jason Steill

Siddharth Alur

An electronic device and associated methods are disclosed. In one example, the electronic device includes a MEMS die located within a substrate, and below a processor die. In selected examples, the MEMS die includes a resonator. Example methods of forming MEMS resonator devices are also shown.

Integrated MEMS resonator and method

An optoelectronic assembly is disclosed, comprising a substrate having a core comprised of glass, and a photonic integrated circuit (PIC) and an electronic IC (EIC) coupled to a first side of the substrate. The core comprises a waveguide with a first endpoint proximate to the first side and a second endpoint exposed on a second side of the substrate orthogonal to the first side. The first endpoint of the waveguide is on a third side of the core parallel to the first side of the substrate. The substrate further comprises an optical via aligned with the first endpoint, and the optical via extends between the first side and the third side. In various embodiments, the waveguide is of any shape that can be inscribed by a laser between the first endpoint and the second endpoint.

Nested glass packaging architecture for hybrid electrical and optical communication devices

Embodiments disclosed herein include electronic packages with embedded inductors and methods of forming such electronic packages. In an embodiment, the electronic package comprises a package core, and a plated through hole (PTH) through a thickness of the package core. In an embodiment, the electronic package further and a magnetic shell around a perimeter of the PTH, where a height of the magnetic shell is less than the thickness of the package core. In an embodiment, the magnetic shell comprises a substantially vertical sidewall and a bottom surface that is tapered.

Stepped coax MIL PTHS for modulating inductance within a package

Embodiments disclosed herein include electronic packages with underfill flow control features. In an embodiment, an electronic package comprises a package substrate and a plurality of interconnects on the package substrate. In an embodiment, a die is coupled to the package substrate by the plurality of interconnects and a flow control feature is adjacent on the package substrate. In an embodiment, the flow control feature is electrically isolated from circuitry of the electronic package. In an embodiment, the electronic package further comprises an underfill surrounding the plurality of interconnects and in contact with the flow control feature.

Protruding SN substrate features for epoxy flow control

Various embodiments disclosed relate to photonic assemblies. The present disclosure includes methods for packaging a photonic assembly, including attaching a bridge die to a glass substrate, attaching an electronic integrated circuit die to the glass substrate and the bridge die, attaching a photonic integrated circuit die to the glass substrate and the bridge die, bonding a coupling adapter to the glass substrate and in situ forming a waveguide in the coupling adapted, the waveguide aligning with the photonic integrated circuit die.

Die last and waveguide last architecture for silicon photonic packaging

In an optical circuit, a substrate can define a cavity that extends into a substrate front surface. A sidewall of the cavity can include a substrate optical port. An optical path can extend through the substrate from a connector optical port to the substrate optical port. A photonic integrated circuit (PIC) can attach to the substrate. A PIC front surface can include a plurality of electrical connections. A PIC edge surface can extend around at least a portion of a perimeter of the PIC between the PIC front surface and a PIC back surface. A PIC optical port can be disposed on the PIC edge surface and can accept or emit an optical beam along a PIC optical axis. The PIC optical axis can be aligned with the substrate optical port when the PIC is attached to the substrate.

Optical circuit with optical port in sidewall

An integrated circuit (IC) package substrate, comprising a magnetic material embedded within a dielectric material. A first surface of the dielectric material is below the magnetic material, and a second surface of the dielectric material, opposite the first surface, is over the magnetic material. A metallization level comprising a first metal feature is embedded within the magnetic material. A second metal feature is at an interface of the magnetic material and the dielectric material. The second metal feature has a first sidewall in contact with the dielectric material and a second sidewall in contact with the magnetic material.

In-plane inductors in IC packages

Embodiments described herein relate to lithographically defined vertical interconnect accesses (litho-vias) for a bridge die first level interconnect (FLI) and techniques of fabricating such litho-vias. In one example, a package substrate comprises a bridge die embedded in the package substrate; a first contact pad outside a perimeter of the bridge die; a second contact pad inside the perimeter of the bridge die and coupled to the bridge die by a first via; a third pad inside the perimeter of the bridge die, adjacent to the second contact pad, and coupled to the bridge die by a second via. The first contact pad has a surface finish disposed thereon. A first protruded interconnect structure is positioned on the first via and a second protruded interconnect structure is positioned on the second via. Each of the first and second vias have sidewalls that are substantially vertical.

Lithographically defined vertical interconnect access (VIA) for a bridge die first level interconnect (FLI)

Embodiments disclosed herein include electronic packages with thermal solutions. In an embodiment, an electronic package comprises a package substrate, a first die electrically coupled to the package substrate, and an integrated heat spreader (IHS) that is thermally coupled to a surface of the first die. In an embodiment, the IHS comprises a main body having an outer perimeter, and one or more legs attached to the outer perimeter of the main body, wherein the one or more legs are supported by the package substrate. In an embodiment, the electronic package further comprises a thermal block between the package substrate and the main body of the IHS, wherein the thermal block is within the outer perimeter of the main body.

Soldered metallic reservoirs for enhanced transient and steady-state thermal performance

Disclosed herein are microelectronic structures including glass cores, as well as related assemblies and methods. In some embodiments, a microelectronic structure may include a glass core having through-glass vias (TGVs) therein; a metallization region at a first face of the glass core, wherein a conductive pathway in the first metallization region is conductively coupled to at least one of the TGVs; a bridge component in the metallization region; a first conductive contact at a face of the metallization region, wherein the first conductive contact is conductively coupled to the conductive pathway; and a second conductive contact at the face of the metallization region, wherein the second conductive contact is conductively coupled to the bridge component.

Microelectronic structures including glass cores

Integrated circuit packages may be formed having at least one optical via extending from a first surface of a package substrate to an opposing second surface of the package substrate. The at least one optical via creates an optical link between the opposing surfaces of the package substrate that enables the fabrication of a dual-sided optical multiple chip package, wherein integrated circuit devices can be attached to both surfaces of the package substrate for increased package density.

Through-substrate optical vias

A glass substrate houses an embedded multi-die interconnect bridge that is part of a semiconductor device package. Through-glass vias communicate to a surface for mounting on a semiconductor package substrate.

Inorganic-based embedded-die layers for modular semiconductive devices

An inductor can be formed in a coreless electronic substrate from magnetic materials and/or fabrication processes that do not result in the magnetic materials leaching into plating and/or etching solutions/chemistries, and results in a unique inductor structure. This may be achieved by forming the inductors from magnetic ferrites. The formation of the electronic substrates may also include process sequences that prevent exposure of the magnetic ferrites to the plating and/or etching solutions/chemistries.

Coreless electronic substrates having embedded inductors

Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a first die in a first dielectric layer; a magnetic core inductor, having a first surface and an opposing second surface, in the first dielectric layer, including a first conductive pillar, having a first end at the first surface of the magnetic core inductor and an opposing second end at the second surface, at least partially surrounded by a magnetic material that extends at least partially along a thickness of the first conductive pillar from the second end and tapers towards the first end; and a second conductive pillar coupled to the first conductive pillar; and a second die in a second dielectric layer on the first dielectric layer coupled to the second surface of the magnetic core inductor.

Microelectronic assemblies having integrated magnetic core inductors

A z-disaggregated integrated circuit package substrate assembly comprises a first substrate component (a coreless patch), a second substrate component (a core patch), and a third substrate component (an interposer). The coreless patch comprises thinner dielectric layers and higher density routing and can comprise an embedded bridge to allow for communication between integrated circuit dies attached to the coreless patch. The core layer acts as a middle layer interconnect between the coreless patch and the interposer and comprises liquid metal interconnects to connect the core patch physically and electrically to the coreless patch and the interposer. Core patch through holes comprise liquid metal plugs. Some through holes can be surrounded by and coaxially aligned with magnetic plugs to provide improved power signal delivery. The interposer comprises thicker dielectric layers and lower density routing. The substrate assembly can reduce cost and provide improved overall yield and electrical performance relative to monolithic substrates.

Package substrate z-disaggregation with liquid metal interconnects

Growing community of inventors

Mesa, AZ, United States of America

Tarek A Ibrahim