Teknologian Tutkimuskeskus Vtt Oy

Tapio Pernu

Jukka Kyynäräinen

Jaakko Saarilahti

Jukka KYYNÄRÄINEN

According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators.

Driving circuits for a piezoelectric microelectromechanical system mirror

According to an example aspect of the present invention, there is provided a lens for a Microelectrical System, MEMS, mirror apparatus, comprising a circular top surface, the circular top surface being provided with a recess having an inclined surface extending from the circular top surface and a side wall having an inclined section extending from the circular top surface, wherein the inclined section is inclined towards the recess and the inclined surface is inclined outward of the recess towards the inclined section.

Lens for a microelectromechanical system mirror

According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement.

Microelectromechanical capacitive pressure sensor having a valve portion being operable to close first output and open second output to equalize pressure

Growing community of inventors

Espoo, Finland

Tapio Pernu