Ebara Corporation

Tao Xu

Yoichi Nakagawa

Suguru Ozawa

Toshifumi Watanabe

Yuji Araki

Toshio Yokoyama

Risa Kimura

Muneto Takahashi

A gas solution supply deviceincludes: a first gas-liquid separatorin which gas solution is stored; a second gas-liquid separatorprovided at a stage subsequent to the first gas-liquid separatorand in which gas solution to be supplied to a use point is stored; an intermediate lineprovided between the first gas-liquid separatorand the second gas-liquid separator; a pressure booster pumpprovided on the intermediate lineand increases a pressure of gas solution being supplied from the first gas-liquid separatorto the second gas-liquid separator; a gas supply linethat supplies gas as a material of the gas solution; and a gas dissolving unitprovided on the intermediate lineand dissolves the gas supplied from the gas supply linein the gas solution supplied from the first gas-liquid separator

Gas solution supply device

A gas-dissolved liquid producing apparatusincludes a gas supply unit, a first liquid supply unit, a gas-dissolved liquid generator, a second liquid generator, a second liquid supply unit, a flow rate measuring unit, and a controller. The controllercontrols the supply amount of the first liquid to be supplied to the gas-dissolved liquid generatoraccording to the flow rate of circulated gas-dissolved liquid measured by the flow rate measuring unit. The gas-dissolved liquid generatordissolves gas supplied from the gas supply unitin first liquid supplied from the first liquid supply unitand second liquid supplied from the second liquid supply unitto generate gas-dissolved liquid.

Gas-dissolved liquid producing apparatus

Provided is a supply-liquid producing apparatus capable of producing a supply liquid by an amount needed at a use point. A supply-liquid producing apparatus includes a mixer that mixes water and ozone gas to produce ozone water; a booster pump that increases the pressure of the water supplied to the mixer; a gas-liquid separation tank that separates the ozone water produced by the mixer into ozone water to be supplied to a use point and exhaust gas to be discharged from an exhaust port; a flowmeter that measures the flow rate of the ozone water supplied from the gas-liquid separation tank to the use point; a flow control unit that adjusts the (flow rate of the water supplied to the mixer by controlling the booster pump in response to the flow rate of the ozone water measured by the flowmeter; and an exhaust pressure control unit that controls the exhaust pressure to keep constant the water level in the gas-liquid separation tank.

Supply-liquid producing apparatus and supply-liquid producing method

Growing community of inventors

Tokyo, Japan

Tao Xu