Macronix International Co., Ltd.

Macronix International

Tao-Cheng Lu

Yao-Wen Chang

Tso-Hung Fan

Yen-Hung Yeh

Chih-Chieh Yeh

Mu-Yi Liu

Shin Su

I-Chen Yang

Wen-Jer Tsai

Chun-Hsiang Lai

Meng-Huang Liu

Guan-Wei Wu

Hung-Sui Lin

Han-Chao Lai

Kwang-Yang Chan

Chia-Ling Lu

Shih-Yu Wang

Mam-Tsung Wang

Yan-Yu Chen

Yu-Lien Liu

Samuel C Pan

Hsing-Wen Chang

Chen-Shang Lai

Kwang Yang Chan

Meng-Hwang Liu

Mu Yi Liu

Nian-Kai Zous

Po-Chou Chen

Chia-Lun Hsu

Kuan-Po Chen

Ichen Yang

Tsung-Hsuan Hsieh

Cheng-Shang Lai

Chih Chieh Yeh

Kent Kuohua Chang

Hung-Yueh Chen

Wen Jer Tsai

Yi Ying Liao

Wenpin Lu

Shih-Keng Cho

Chen-Han Chou

Yao Wen Chang

Ta-Hui Wang

Hui-Chih Lin

Chu-Yung Liu

Tao-Yuan Lin

Yaowen Chang

Chung Ju Chen

Sing Su

Shih Yu Wang

Che-Shih Lin

Cha-Ling Lu

Chuyung Liu

Tso Hung Fan

Latch-up test device and method are provided, and the method includes following steps. A set operation is performed for setting a basic test value according to a test range and setting a trigger pulse and a predetermined error value by the basic test value. A test on a test chip in a wafer under test is performed by the trigger pulse, and whether the test chip is in a latch-up state is determined. Whether to update a test range and a latch-up threshold value and whether to return to the step of performing the set operation are determined according to a determination result, the latch-up threshold value and the basic test value. When the test chip is in the latch-up state and a difference between the latch-up threshold value and the basic test value is not greater than the predetermined error value, the test on the test chip is stopped.

Latch-up test device and method for testing wafer under test

An electrostatic discharge protection device including a PNP transistor, a protection circuit and an adjustment circuit is provided. An emitter of the PNP transistor is electrically connected to a pad, and a collector of the PNP transistor is electrically connected to a ground. The protection circuit is electrically connected between a base of the PNP transistor and the ground, and provides a discharge path. When an electrostatic signal occurs on the pad, the electrostatic signal is conducted to the ground through the discharge path and the PNP transistor. The adjustment circuit is electrically connected between the emitter and the base of the PNP transistor. When a power voltage is supplied to the pad, the adjustment circuit provides a control voltage to the base of the PNP transistor according to the power voltage, so as to prevent the emitter and the base of the PNP transistor from being forward biased.

Electrostatic discharge protection device

A semiconductor device manufacturing method includes preparing a wafer having projections formed on a substrate. The projections project upward from a surface of the substrate and have a height measured from the surface of the substrate. The method further includes determining an interval distribution representing a distribution of intervals between neighboring projections and calculating an implantation angle based on the height and the interval distribution. The implantation angle is an angle between a normal direction of the substrate and an implantation direction. The method also includes implanting ions at the calculated implantation angle.

Method for manufacturing semiconductor devices

Provided is a semiconductor device. Two stack layers are disposed on a substrate of a first conductivity type. Each of stack layers includes a dielectric layer and a conductive layer. The dielectric layer is disposed on the substrate. The conductive layer is disposed on the dielectric layer. First doped region of a second conductivity type has a first dopant and is disposed in the substrate between the stack layers. A pre-amorphization implantation (PAI) region is disposed in the first doped region. A second doped region of the second conductivity type has a second dopant and is disposed in the PAI region. The first conductivity type is different from the second conductivity type. A diffusion rate of the second dopant is faster than a diffusion rate of the first dopant, and a thermal activation of the second dopant is higher than that of the first dopant.

Semiconductor device and method for fabricating the same

A programming method of a memory array is provided and includes following steps, wherein the memory array includes a target memory cell and two periphery memory cells electrically connected to a first word line. After a first programming operation is performed on the target memory cell, the target memory cell and the two periphery memory cells are verified to obtain a first verification result. Whether to perform a second programming operation or a third programming operation on the target memory cell is determined according to the first verification result. The step of performing the second programming operation or the third programming operation on the target memory cell includes: turning off a first transistor and a second transistor; and increasing a level of a passing voltage for turning on a plurality of non-target memory cells and a level of a programming voltage transmitted by the first word line.

Programming method of memory array

The memory device is provided to include a substrate, a plurality of stack structures, conductive pillars, charge storage layers, and third conductive layers. The stack structures are arranged along a first direction and extend along a second direction, wherein each stack structure includes a plurality of first conductive layers and a plurality of dielectric layers that are alternately stacked along a third direction. Each conductive pillar is located on the substrate between two adjacent stack structures. Each charge storage layer is disposed between the stack structures and the conductive pillars. Each third conductive layer extending along the first direction overlaps the stack structures in a plurality of overlapped regions and covers a portion of top parts of the stack structures and the conductive pillars. An air gap is formed along the third direction in each overlapped region where the stacked structures and the third conductive layers overlap.

Memory device and method for fabricating the same

An operation method of a multi-level memory is provided. A first read voltage lower than a standard read voltage is applied to a doped region in a substrate at one side of a control gate of the memory, so as to determine whether a first storage position and a second storage position are both at the lowest level.

Operation method of multi-level memory

An electrostatic discharge tolerant device includes a semiconductor body having a first conductivity type, and a pad. A surrounding well having a second conductivity type is laid out in a ring to surround an area for an electrostatic discharge circuit in the semiconductor body. The surrounding well is relatively deep, and in addition to defining the area for the electrostatic discharge circuit, provides the first terminal of a diode formed with the semiconductor body. Within the area surrounded by the surrounding well, a diode coupled to the pad and a transistor coupled to the voltage reference are connected in series and form a parasitic device in the semiconductor body.

ESD tolerant I/O pad circuit including a surrounding well

A semiconductor device includes a substrate, and first and second wells formed in the substrate. The first well has a first conductivity type. The second well has a second conductivity type different than the first conductivity type. The device includes a first heavily-doped region having the first conductivity type and a second heavily-doped region having the first conductivity type. A portion of the first heavily-doped region is formed in the first well. The second heavily-doped region is formed in the second well. The device also includes an insulating layer formed over a channel region of the substrate between the first and second heavily-doped regions, and a gate electrode formed over the insulating layer. The device further includes a terminal for coupling to a circuit being protected, and a switching circuit coupled between the terminal and the first heavily-doped region, and between the terminal and the gate electrode.

Semiconductor device

An ESD protection circuit including a substrate of a first conductivity type, an annular well region of a second conductivity type, two first regions of the first conductivity type and at least one transistor of the second conductivity type is provided. The annular well region is disposed in the substrate. The first regions are disposed in the substrate and surrounded by the annular well region. The at least one transistor is disposed on the substrate between the first regions and including a source, a gate, and a drain. The annular well region and the drain are coupled to a first voltage source. The source and one of the first regions are coupled to a second voltage source, and the other of the first regions is coupled to a substrate triggering circuit.

Electrostatic discharge protection circuit

A non-volatile memory and a manufacturing method thereof are provided. The non-volatile memory includes a substrate, a gate structure, a first doped region, a second doped region and a pair of isolation structures. The gate structure is disposed on the substrate. The gate structure includes a charge storage structure, a gate and spacers. The charge storage structure is disposed on the substrate. The gate is disposed on the charge storage structure. The spacers are disposed on the sidewalls of the gate and the charge storage structure. The first doped region and the second doped region are respectively disposed in the substrate at two sides of the charge storage structure and at least located under the spacers. The isolation structures are respectively disposed in the substrate at two sides of the gate structure.

Non-volatile memory having isolation structures in and above a substrate and manufacturing method thereof

A non-volatile memory is provided. The non-volatile memory includes a oxide and polysilicon stack structure and charge storage layers. The oxide and polysilicon stack structure is disposed on a substrate. There are recesses in the substrate at two sides of the oxide and polysilicon stack structure. The oxide and polysilicon stack structure includes an oxide layer and a polysilicon layer. The oxide layer is disposed on the substrate, wherein there is an interface between the oxide layer and the substrate. The polysilicon layer is disposed on the oxide layer. The charge storage layers are disposed in the recesses and extend to a side wall of the oxide and polysilicon stack structure, and a top surface of each of the charge storage layers is higher than the interface.

Non-volatile memory

A memory array includes a charge storage structure and a plurality of conductive materials over the charge storage structure is provided. Each conductive material, serving as a word line, has a substantially arc-sidewall and a substantially straight sidewall.

Memory array

A semiconductor device includes a first well region of a first conductivity type, a second well region of a second conductive type within the first well region. A first region of the first conductivity type and a second region of the second conductivity type are disposed within the second well region. A third region of the first conductivity type and a fourth region of the second conductivity type are disposed within the first well region, wherein the third region and the fourth region are separated by the second well region. The semiconductor device also includes a switch device coupled to the third region.

Methods and structures for electrostatic discharge protection

A non-volatile memory and a manufacturing method thereof are provided. The non-volatile memory including a gate structure disposed on a substrate, doped regions, charge storage layers, and a first dielectric layer. There are recesses in the substrate at two sides of the gate structure. The gate structure includes a gate dielectric layer disposed on the substrate and a gate disposed on the gate dielectric layer. There is an interface between the gate dielectric layer and the substrate. The doped regions are disposed in the substrate around the recesses. The charge storage layers are disposed in the recesses, and a top surface of each of the charge storage layers is higher than the interface. The first dielectric layer is disposed between the charge storage layers and the substrate, and between the charge storage layers and the gate structure.

Non-volatile memory and manufacturing method thereof

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Hsinchu, Taiwan

Tao-Cheng Lu