Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Sms Ltd. (1 from 83 patents)
1 patent:
1. 11366383 - Method and apparatus for determining positions of a plurality of pixels to be introduced in a substrate of a photolithographic mask