Infineon Technologies Ag

Tanja Schest

Uwe Hoeckele

Klaus Goller

Reinhard Goellner

Christof Jalics

Walter Preis

Sandra Obernhuber

Patricia Nickut

Joerg Adler

A method for manufacturing a device on a substrate includes forming a layer structure on the substrate, forming an auxiliary layer on the layer structure, forming a planarization layer on the auxiliary layer and on the substrate, exposing the auxiliary layer by a chemical mechanical polishing process and removing at least partly the auxiliary layer to form a planar surface of the remaining auxiliary layer or of the layer structure and the planarization layer. The chemical mechanical polishing process has a first removal rate with respect to the planarization layer and a second removal rate with respect to the auxiliary layer and the first removal rate is greater than the second removal rate.

Method for manufacturing a device on a substrate

A method of producing a capacitor that includes producing a first electrode having a first surface; forming a recess in an element, walls of the element and the first surface of the first electrode defining the recess, the element having a first surface exterior of the recess; forming a dielectric layer on the element, the dielectric layer oriented against the first surface of the element and against the walls of the element within the recess; polishing off at least a portion of the dielectric layer oriented against the first surface of the element to electrically isolate the portion of the dielectric layer located in the recess from any portion of the dielectric layer remaining outside the recess; and producing a second electrode, the second electrode oriented at least partially within the recess with the dielectric layer oriented between the first electrode and the second electrode.

Method of making a semiconductor element

Growing community of inventors

Steinberg am See, Germany

Tanja Schest