United Microelectronics Corp.

Tan-Ya Yin

Chia-Wei Huang

Ming-Jui Chen

Yu-Cheng Tung

Yi-Wei Chen

Ching-Wen Hung

Chih-Sen Huang

Yi-Hui Lee

Jia-Rong Wu

Chia-Lin Lu

Shu-Ru Wang

Ying-Cheng Liu

Chin-Sheng Yang

Yung-Feng Cheng

Yi-Kuan Wu

Wei-Cyuan Lo

Ting-Cheng Tseng

Shih-Hsun Kuo

A semiconductor device is provided. The semiconductor device includes a substrate and a patterned metal gate layer. The substrate includes a first fin segment and a second fin segment respectively protruding from a top surface of the substrate. The first fin segment and the second fin segment respectively extend along a first direction and are arranged along a second direction, the first fin segment comprises a first fin structure at an end of the first fin segment, and the second fin segment comprises a first recess at an end of the second fin segment, and the first recess and the first fin structure are arranged along the second direction. The patterned metal gate layer is disposed on the substrate, and the patterned metal gate layer covers the first fin structure.

Semiconductor device

A static random access memory unit structure and layout structure includes two pull-up transistors, two pull-down transistors, two slot contact plugs, and two metal-zero interconnects. Each metal-zero interconnect is disposed on each slot contact plug and a gate of each pull-up transistor, in which, each slot contact plug crosses a drain of each pull-down transistor and a drain of each pull-up transistor and extends to cross an end of each metal-zero interconnect. A gap between the slot contact plugs is smaller than a gap between the metal-zero interconnects.

Static random access memory unit structure

A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a substrate, a patterned conductive layer and an epitaxial layer. The substrate includes a first fin structure and a second fin structure respectively protruding from a top surface of the substrate, and the second fin structure has a recess. The patterned conductive layer is disposed on the substrate and covers a first end of the first fin structure. The epitaxial layer is disposed in the recess. The first end of the first fin structure and a second end of the epitaxial layer face a first direction.

Semiconductor device and manufacturing method thereof

A method of forming a semiconductor structure is provided. A substrate having a memory region is provided. A plurality of fin structures are provided and each fin structure stretching along a first direction. A plurality of gate structures are formed, and each gate structure stretches along a second direction. Next, a dielectric layer is formed on the gate structures. A first patterned mask layer is formed, wherein the first patterned mask layer has a plurality of first trenches stretching along the second direction. A second patterned mask layer on the first patterned mask layer, wherein the second patterned mask layer comprises a plurality of first patterns stretching along the first direction. Subsequently, the dielectric layer is patterned by using the first patterned mask layer and the second patterned mask layer as a mask to form a plurality of contact vias. The contact holes are filled with a conductive layer.

Method of forming semiconductor structure

Static random access memory layout structure

The present invention provides a semiconductor structure, including a substrate, a plurality of fin structures, a plurality of gate structures, a dielectric layer and a plurality of contact plugs. The substrate has a memory region. The fin structures are disposed on the substrate in the memory region, each of which stretches along a first direction. The gate structures are disposed on the fin structures, each of which stretches along a second direction. The dielectric layer is disposed on the gate structures and the fin structures. The contact plugs are disposed in the dielectric layer and electrically connected to a source/drain region in the fin structure. From a top view, the contact plug has a trapezoid shape or a pentagon shape. The present invention further provides a method for forming the same.

Semiconductor structure and method of forming the same

A manufacturing method for forming a semiconductor structure includes: first, a plurality of fin structures are formed on a substrate and arranged along a first direction, next, a first fin cut process is performed, so as to remove parts of the fin structures which are disposed within at least one first fin cut region, and a second fin cut process is then performed, so as to remove parts of the fin structures which are disposed within at least one second fin cut region, where the second fin cut region is disposed along at least one edge of the first fin cut region.

Method for forming a semiconductor structure

Growing community of inventors

Nantou County, Taiwan

Tan-Ya Yin