Tokyo Ohka Kogyo Co., Ltd.

Tdk Corporation

Tamotsu Sasaki

Akihiko Nakamura

Masakazu Hirose

Yuji Umeda

Yuiko Hirose

Hiroki Katoh

Taiichiro Aoki

Junichi Katsuragawa

Satoshi Kobari

Seiji Ohishi

A piezoelectric composition containing: a complex oxide having a perovskite structure represented by a general formula of ABO; copper; and one or more elements selected from the group consisting of chromium, nickel and zinc, in which in ABO, an A-site element is potassium and a B-site element is niobium, or niobium and tantalum, with respect to 1 mol of the complex oxide, a content ratio of the copper is &#x3b1; mol % in terms of CuO, a content ratio of one or more elements selected from the group consisting of chromium, nickel and zinc is &#x3b2; mol % in terms of CrO, NiO, ZnO, &#x3b1; satisfies a relationship of 0.2&#x2264;&#x3b1;&#x2264;2.5, and &#x3b2; satisfies a relationship of 0.2&#x2264;&#x3b2;&#x2264;2.0.

Piezoelectric composition and piezoelectric element

Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.

Alignment apparatus and alignment method

A multi-stage type processing apparatus which can be positioned in a limited space without having a complicated driving mechanism, includes processing units which are stacked in a multi-stage state in the vertical direction. Each processing unit has a cup surrounding a substrate and a chuck for retaining and rotating a substrate, and the cup can be elevated and lowered with respect to the chuck. A cylinder unit is contracted and thereby all the cups are unitarily lowered, so that the top surface of the chuck is located in a slightly upper position with respect to the top surface of the cup. In this state, a substrate is mounted on the chuck and attracted. Next, the cylinder unit is extended and thereby all the cups are unitarily elevated so as to accommodate the substrate therein. In this state, developing liquid is dropped from a nozzle for developing liquid onto the center of the substrate, and a motor is driven to rotate the chuck (the substrate) via a drive shaft and a timing belt to allow the developing liquid to cover the entire surface of the substrate.

Multi-stage type processing apparatus

Growing community of inventors

Tokyo, Japan

Tamotsu Sasaki