Tokyo Electron Limited

Tamotsu Hatakeyama

Harunari Hasegawa

Masahiro Kobayashi

Michihiro Takahashi

Hisashi Inoue

Hiroshi Kikuchi

Yoshihisa Kumagai

Daisuke Yamanaka

Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift.

Assembling apparatus and assembling method for semiconductor manufacturing apparatus

A method for conveying a reaction tube unit including a vertical reaction tube and a gas supply pipe provided at a distance from an inner wall of the vertical reaction tube along a longitudinal direction thereof, the method includes: arranging a buffer inside the reaction tube between the inner wall and the gas supply pipe to alleviate a collision; placing the reaction tube unit attached with the buffer on a carriage via a vibration isolator; and conveying the reaction tube unit by moving the carriage.

Method for conveying reaction tube unit

Growing community of inventors

Iwate, Japan

Tamotsu Hatakeyama