Kabushiki Kaisha Toshiba

Tamio Ikehashi

Kenichi Imamiya

Ken Takeuchi

Kazushige Kanda

Yasushi Tomizawa

Hiroaki Yamazaki

Junichiro Noda

Koji Hosono

Toshihiko Himeno

Ryunosuke Gando

Hiroshi Nakamura

Naofumi Nakamura

Kei Masunishi

Yoshihisa Sugiura

Tomoharu Tanaka

Yoshihisa Iwata

Takashi Ohsawa

Akira Fujimoto

Tomohiro Saito

Shiori Kaji

Tatsuya Ohguro

Mie Matsuo

Etsuji Ogawa

Haruka Yamamoto

Shunta Maeda

Tetsuro Itakura

Takashi Mori

Takuya Futatsuyama

Hiroyuki Hara

Takayuki Miyazaki

Jun Deguchi

Kei Watanabe

Katsuyuki Fujita

Akihiro Koga

Yoshiaki Shimooka

Yumi Hayashi

Shuichi Sekine

Daiki Ono

Yusaku Asano

Yohei Hatakeyama

According to one embodiment, a sensor includes a movable member including a first movable portion and a second movable portion, and a first fixed member. At least a portion of the first fixed member is between the first movable portion and the second movable portion. The first fixed member includes a first fixed counter portion opposing the first movable portion, and a second fixed counter portion opposing the second movable portion. The first fixed counter portion includes a first fixed protruding portion protruding toward the first movable portion. The second fixed counter portion includes a second fixed protruding portion protruding toward the second movable portion.

Sensor

According to one embodiment, a sensor includes a movable member, first, and second counter electrodes, first, and second resistances, and a control device. The movable member includes first and second electrodes and is capable of vibrating. The vibration of the movable member includes first and second components. The first component is along a first direction. The second component is along a second direction crossing the first direction. The first counter electrode opposes the first electrode. The second counter electrode opposes the second electrode. The first resistance includes first and first other end portions. The second resistance includes a second end portion and a second other end portion. The first other end portion is electrically connected to the first counter electrode. The second other end portion is electrically connected to the second counter electrode. The control device includes a controller configured to perform at least a first operation.

According to one embodiment, a method for controlling a vibration device includes a movable body capable of vibrating in a first direction, and a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction, wherein in a condition that tc is a time from a rise start time point to a rise end time point of an applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and td is a period of the free vibration in the first direction of the movable body, the time tc is longer than the time td.

Vibration device and method for controlling the same

According to one embodiment, a resonator is disclosed. The resonator includes a vibrator and an attenuation mechanism. The attenuation mechanism selectively attenuates vibration of a spurious mode that is mechanically coupled to a first mode when the vibrator vibrates in the first mode.

Resonator and device including the same

A gas detection device includes a substrate having a main surface and a movable film structure located on, and including a portion thereof spaced from, the main surface of the substrate. The portion of the movable film structure located over and spaced from the substrate includes a first film formed of an insulating material, a patterned second film which deforms as a result of absorbing or adsorbing a predetermined gas, and a patterned third film comprising a resistive heater, at least a portion of the movable film structure spaced from the substrate being movable with respect to the substrate. From the perspective of a direction perpendicular to the main surface of the substrate, at least a portion of a pattern of the second film overlaps at least a portion of a pattern of the third film.

Gas detection device

According to one embodiment, a gyro sensor system including a gyro sensor unit is disclosed. The unit includes a movable body, a spring mechanism, a detector, an adjuster, and a rotation angle acquisition unit. The spring mechanism vibrates the movable body. A detector detects an amplitude of vibration of the movable body due to Coriolis force. The adjuster adjusts a first resonance frequency of vibration of the movable body in free vibration and a second resonance frequency of vibration of the movable body due to Coriolis force on the movable body so that the first and second resonance frequencies are to coincide with each other based on the amplitude of the vibration due to Coriolis force. The rotation angle acquisition unit acquires a rotation angle of the movable body, based on the amplitude of the vibration due to Coriolis force.

Gyro sensor system

According to one embodiment, an IC chip includes a plurality of fuse elements including a plurality of fuse portions each of which is to be cut off by a stress, and a plurality of actuator portions provided for the plurality of fuse portions, respectively, and each of which applies a stress to corresponding one of fuse portions, and a control circuit supplying a control signal for cutting off desired one of the fuse portions to corresponding one of the actuator portions.

IC chip and method of determining a fuse to be cut off

According to one embodiment, a sensor device includes a movable body capable of vibrating, and a catch-and-release mechanism capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member configured to reduce a force acting between the movable body and the stopper portion.

Sensor device employing MEMS

According to one embodiment, a gas sensor is disclosed. The gas sensor includes a substrate region, a first electrode provided on the substrate region, and a movable structure above the first electrode. The movable structure includes a deformable member which deforms by absorbing or adsorbing a predetermined gas, a heat member which heats the deformable member, and a second electrode. The gas sensor further includes a first cavity region which is provided between the first electrode and the second electrode.

Gas sensor and manufacturing method of the same

According to one embodiment, a vibration device includes a first movable unit including first and second movable portions arranged in a direction parallel to a first axis and enabled to vibrate in the direction parallel to the first axis, a second movable unit enabled to vibrate in a direction parallel to a second axis perpendicular to the first axis, and a connection unit configured to connect the first and second movable units together, wherein the following relationship is satisfied&#x3e;(1+1/(2))where a resonant frequency of the first movable unit in an in-phase mode is denoted by fi, a resonant frequency of the first movable unit in an anti-phase mode is denoted by fa, and a Q factor of resonance of the first movable unit in the anti-phase mode is denoted by Qa.

Vibration device

An angular velocity acquisition device includes a movable body, a drive electrode to which a drive voltage is applied to vibrate the movable body in a first direction, at least one stopper that stops the movable body at a predetermined position, a hold electrode which receives a hold voltage to hold the movable body at the predetermined position, a detection unit that detects a predetermined physical quantity depending on an amplitude of the vibration of the movable body in a second direction based on a Coriolis force acting on the movable body that vibrates in the first direction, and an angular velocity calculation unit that calculates an angular velocity of the movable body based on the predetermined physical quantity detected by the detection unit.

Angular velocity acquisition device and electronic component for acquiring angular velocity

According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.

Angular velocity acquisition device

According to one embodiment, a method of acquiring rotational information of a gyro sensor includes sensing a predetermined physical quantity which depends upon an amplitude of a vibration in a second direction, the vibration in the second direction being based on Coriolis force that is applied to a movable body which is vibrating in a first direction, calculating rotational information of the movable body based on the sensed predetermined physical quantity, and stopping a vibration in the first direction of the movable body after the predetermined physical quantity is sensed.

Method for acquiring angular velocity of gyro sensor and device for doing the same

According to one embodiment, a sensor is disclosed. The sensor includes a substrate, a first fixed electrode arranged on the substrate, a movable electrode arranged above the first fixed electrode and being movable non-parallely, a second fixed electrode arranged above the movable electrode. The sensor further includes a detector to detect a difference between a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the movable electrode and the second fixed electrode.

Growing community of inventors

Yokohama, Japan

Tamio Ikehashi