Varian Semiconductor Equipment Associates, Inc.

Tamer Onat

Joseph P Dzengeleski

Gregg Alexander Norris

Greg Gibilaro

David Olden

A Faraday sensor test system includes a Faraday sensor configured to intercept a quantity of ions incident on said Faraday sensor, a primary conductor and a test conductor coupled to said Faraday sensor, and a controller. The controller is configured to automatically provide a test current into the test conductor in response to a test condition. The controller is further configured to receive a return current from the primary conductor in response to the test current and to compare the return current to a value representative of the test current to determine a condition of a conductive path comprising the test conductor, the Faraday sensor, and the primary conductor.

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Winchester, MA, United States of America

Tamer Onat