Asml Holding N.v.

Tamer Mohamed Tawfik Ahmed Elazhary

Justin Lloyd Kreuzer

Stephen Roux

Mohamed Swillam

Yuxiang Lin

A system includes a radiation source, first and second phased arrays, and a detector. The first and second phased arrays include optical elements, a plurality of ports, waveguides, and phase modulators. The optical elements radiate radiation waves. The waveguides guide radiation from a port of the plurality of ports to the optical elements. Phase modulators adjust phases of the radiation waves. One or both of the first and second phased arrays form a first beam and/or a second beam of radiation directed toward a target structure based on the port coupled to the radiation source. The detector receives radiation scattered by the target structure and generates a measurement signal based on the received radiation.

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New Canaan, CT, United States of America

Tamer Mohamed Tawfik Ahmed Elazhary