Sumitomo Chemical Company, Limited

Takuya Nakagawa

Koji Ichikawa

Tatsuro Masuyama

Disclosed are a compound represented by formula (I), a resin and a resist composition: wherein Rrepresents an alkyl group having 1 to 6 carbon atoms which may have a halogen, hydrogen or halogen atom, Rand Reach independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, Rrepresents a fluorine atom, an alkyl fluoride group having 1 to 6 carbon atoms or an alkyl group having 1 to 12 carbon atoms, and &#x2014;CH&#x2014; included in the alkyl fluoride group and the alkyl group may be replaced by &#x2014;O&#x2014; or &#x2014;CO&#x2014;, Rrepresents a hydrogen atom, an alkylcarbonyl group having 2 to 6 carbon atoms or an acid-labile group, m2 represents an integer of 1 to 4, m4 represents an integer of 0 to 3, and m5 represents 1 or 2, in which 2&#x2264;m2+m4+m5&#x2264;5.

Compound, resin, resist composition and method for producing resist pattern

Disclosed are a compound represented by formula (I), a resin and a resist composition: wherein Rrepresents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; Lrepresents a single bond or &#x2014;CO&#x2014;O*; Rrepresents an alkyl group, and &#x2014;CH&#x2014; included in the group may be replaced by &#x2014;O&#x2014; or &#x2014;CO; Rrepresents a fluorine atom, an alkyl fluoride group or an alkyl group, and &#x2014;CH&#x2014; included in the alkyl fluoride group and the alkyl group may be replaced by &#x2014;O&#x2014; or &#x2014;CO&#x2014;; Rrepresents a hydrogen atom, an alkylcarbonyl group or an acid-labile group; m2 and m3 represent an integer of 1 to 3, m4 represents an integer of 0 to 2, and m5 represents 1 or 2, in which 3&#x2264;m2+m3+m4+m5&#x2264;5.

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Osaka, Japan

Takuya Nakagawa