Average Co-Inventor Count = 5.83
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,295 patents)
2 patents:
1. 9640388 - Method for forming insulating film and method for manufacturing semiconductor device
2. 8765605 - Surface treatment for a fluorocarbon film