Dainippon Screen Mfg. Co., Ltd.

Omron Corporation

Screen Semiconductor Solutions Co., Ltd.

Takuya Kuroda

Hiroaki Sugimoto

Seiichiro Okuda

Masanobu Sato

Shuichi Yasuda

Kenya Morinishi

Sadao Hirae

Masayoshi Imai

Masahiko Harumoto

Akihiro Hisai

Akira Yamaguchi

Minoru Sugiyama

Mihoko Takahashi

Takeshi Yoshida

Hiroshi Kato

Tadashi Sasaki

Miharu Sakuragi

Koji Sogo

Hiroyuki Iwao

Hiroo Kawasaki

Fumihiko Kubo

A method for developing a substrate includes spinning the substrate with a spin holder and discharging a developer to the substrate from a plurality of exhaust ports arranged in a row on a developer feeder. The method also includes causing a moving mechanism to move said developer feeder in one direction extending to a center of the substrate in plan view while maintaining a direction of arrangement of said exhaust ports in said one direction, thereby to move said developer feeder between substantially the center and an edge of the substrate. The method further includes causing the developer discharged from said exhaust ports to impinge in separate streams on the substrate, and causing each of the separate streams to impinge spirally on the substrate, thereby to develop the substrate. At least two of loci of positions of impingement of the developer corresponding to said exhaust ports overlap each other.

Developing apparatus

Developing method

A risk monitoring system is formed of a client terminal, a risk management apparatus, and a security device. A risk calculation portion in the risk management apparatus calculates the vulnerability of each room inside the workplace quantitatively in terms of three viewpoints: individuals, assets, and space, and calculates a risk value of an internal crime in each room in real time by multiplying the vulnerability by the internal crime probability and the asset value. A risk analysis portion analyzes a risk state on the basis of the risk value thus calculated and the analysis result is displayed on a display portion of the client terminal. It is thus possible to understand a risk situation of an internal crime against assets to protect in real time for enabling an action to be taken appropriately according to the situation.

Risk monitoring apparatus, risk monitoring system, and risk monitoring method

The substrate processing apparatus is provided with a gas-liquid mixing nozzle for generating a process liquid mist by mixing a liquid and a pressurized gas, to discharge the process liquid mist to a substrate at high speeds. The liquid may be remover liquid, intermediate rinse liquid or deionized water. The reaction products which having been generated on the substrate in etching process is removed at high speeds with the flow of the mist, whereby the quality of the process is improved.

Substrate processing apparatus

The invention provides a highly-reliable face collation apparatus and biometrics data collation apparatus in both of which when a person is to be identified, even at the time of a collation in which characteristic data on the person approximates to characteristic data on one of the other persons, the characteristic data are comprehensively collated by combination, whereby the person and the other person can be clearly discriminated from each other to reduce collation errors. The face collation apparatus includes a face image acquiring unit for acquiring face images, a storage unit in which a plurality of different face images on each of persons who are collation targets are stored in advance in such a manner as to be associated with each of the persons, a calculating unit for calculating collation degree data obtained by comparing the acquired face images with the stored face images, an extracting unit for extracting face images of high collation degrees by a predetermined number from among the calculated collation degree data, and an identifying unit for identifying a person when all face images of the person are contained in results extracted by the extracting unit.

Face collation apparatus and biometrics data collation apparatus

There are provided a living body collating device, a living body collating system and a living body collating method, which is equipped with optimization candidate data extracting meansfor extracting optimization candidate data for data renewal from past record data of living body information achieved, optimization candidate data storage meansfor storing the optimization candidate data extracted by the optimization candidate data extracting means, and renewal storage meansfor storing, as new registration data, the data having higher priorities of the optimization candidate data stored in the optimization candidate data storage meansand registration data stored in registration data storage means.

Device, system, and method for identifying living bodies and renewing registration data

In a substrate treating unit, a removal liquid supplying mechanism supplies a removal liquid to the surface of a substrate. In order to retain the removal liquid on the surface of the substrate for a fixed time, a spin chuck is operated to spin the substrate at such a low speed as to retain the removal liquid on the substrate, or spins the substrate intermittently, or temporarily stops spinning of the substrate. Thus, treatment with the removal liquid progresses without a further supply of the removal liquid, thereby restraining consumption of the removal liquid.

Substrate treating method and substrate treating apparatus

A removal liquid is supplied to a substrate on which a thin film formed is patterned by dry etching using a resist film as a mask, and cleaning is made with de-ionized water, thereby removing a reaction product generated on the surface of the substrate. After that, the processed substrate is heated, thereby completely drying the substrate from which the reaction product has been eliminated.

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Kyoto, Japan

Takuya Kuroda