Hamamatsu-photonics K.k.

Takuya Homme

Toshio Takabayashi

Hiroto Sato

Takaharu Suzuki

Kazuhisa Miyaguchi

Yoshio Natsume

Kazuki Fujita

Harumichi Mori

Ryuji Kyushima

Masahiko Honda

Toshio Takabayahsi

A scintillator paneluses a glass substratehaving heat resistance, as a base member for forming a scintillatorGlass substratealso functions as a radiation entry window. Also, a dielectric multilayer film mirroris disposed as a light-reflecting film between the scintillatorand the glass substrateFurthermore, a light-absorbing filmis disposed on the radiation entry surface of glass substrateand this absorbs the light that has been emitted from scintillatorand has passed through the dielectric multilayer film mirrorand the glass substrateLight components that are reflected by the radiation entry surface, etc., and return to the dielectric multilayer film mirrorand the scintillatortherefore do not occur and the optical output of the scintillator panelis not subject to degrading effects.

Scintillator panel, radiation image sensor and methods of producing them

Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.

Scintillator panel

An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

Scintillator panel and radiation image sensor

An organic film vapor deposition method includes a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from the vapor deposition table; a second step of introducing the vapor deposition table having the substrate supported by the target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of the substrate, provided with the scintillator, introduced into the vapor deposition chamber.

Organic film vapor deposition method

Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. On the light-receiving surface of the light-receiving device array, a scintillator made of columnar crystals of CsI is deposited. On the other hand, a resin frame formed like an elongated frame is disposed inside the bonding pads. Inside this frame, a protective film in which an inorganic film is held between organic films made of Parylene is laminated. The outer periphery of the protective film is in close contact with the resin frame with the aid of the coating resin.

Radiation detection device and method of making the same

A scintillator panel () comprises a radiation-transparent substrate(), aflat resin film () formed on the substrate (), a reflecting film () formed on the flat resin film (), a deliquescent scintillator () formed on the reflecting film (), and a transparent organic film () covering the scintillator ().

Scintillator panel, radiation image sensor, and methods of making the same

A solid-state imaging elementhaving a light-receiving portion where a plurality of photoelectric conversion elementsare arranged, and electrode padselectrically connected to the photoelectric conversion elementsis mounted on a substratehaving external connection electrodesand electrode padselectrically connected to them. A scintillatoris formed on the surface of the light-receiving portion of the solid-state imaging element. The electrodes padsandare electrically connected by wiring lines. An electrical insulating organic filmtightly seals the scintillatorand covers the electrode padsandand the wiring lines. A metal thin filmis formed on the organic film

Radiation detector and method of manufacture thereof

A scintillator paneluses a glass substrate, having heat resistance, as a base member for forming a scintillator. Glass substratealso functions as a radiation entry window. Also, a dielectric multilayer film mirroris disposed as a light-reflecting film between the scintillatorand the glass substrate. Furthermore, a light-absorbing filmis disposed on the radiation entry surface of glass substrateand this absorbs the light that has been emitted from scintillatorand has passed through the dielectric multilayer film mirrorand the glass substrate. Light components that are reflected by the radiation entry surface, etc., and return to the dielectric multilayer film mirrorand the scintillatortherefore do not occur and the optical output of the scintillator panelis not subject to degrading effects.

In a scintillator panel comprising a deliquescent scintillator formed on an FOP and a polyparaxylylene film covering over the scintillator, the FOP comprises a protective film peeling prevention rough at a side wall portion thereon coming into contact with the polyparaxylylene film.

The surfaces of an amorphous carbon substrate of a scintillator panel have undergone sandblasting, and an Al filmserving as a reflecting film is formed on one surface, and a columnar scintillator for converting incident radiation into visible light is formed on the surface of the Al film.

Scintillator panel () comprises a radiation transmitting substrate (), which has heat resistance, a dielectric multilayer film mirror (), as a light reflecting film and is formed on the radiation transmitting substrate (), and a scintillator (), disposed on the dielectric multilayer film mirror () and emits light by conversion of the radiation () that has been made to enter the radiation transmitting substrate () and has passed through the dielectric multilayer film mirror (). Since the radiation transmitting substrate () has heat resistance, the dielectric multilayer film mirror () can be vapor deposited at a high temperature and, as a result, can be formed in a state of high reflectance. Also, unlike a metal film, the dielectric multilayer film mirror () will not corrode upon reacting with the scintillator ().

A radiation image sensor comprises (1) an image sensorhaving a plurality of light receiving elements arranged one or two dimensionally, (2) scintillatorhaving columnar structure formed on the light-receiving surface of this image sensorto convert radiation into light including wavelengths that can be detected by the image sensor, (3) a protective filmformed so as to cover and adhere to the columnar structure of the scintillator, and (4) a radiation-transmittable reflective platethat has a reflective surfacedisposed to face the image sensor across the protective film

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Hamamatsu, Japan

Takuya Homme