Shinkawa Ltd.

Takuya Asami

Nobuyuki Aoyagi

Hikaru Miura

Mitsuaki Sakakura

Yuhei Ito

Yasumoto Togashi

An ultrasonic horn () includes: a vibration source part () to which an ultrasonic vibrator () is mounted; a tip end part () to which a capillary () is mounted; and an intermediate part () which is interposed between the tip end part () and the vibration source part () and propagates vibration generated by the ultrasonic vibrator () to the tip end part (). The intermediate part () is formed with a single spiral hole () which is a hole penetrating in a radial direction of the ultrasonic horn () and advances in an axial direction as the spiral hole advances in a circumferential direction.

Ultrasonic horn and manufacturing apparatus of semiconductor device

An ultrasonic horn is provided with: a vibration generating unit configured to generate longitudinal vibration having a frequency in the ultrasonic band on the basis of a signal having a frequency in the ultrasonic band input from an oscillator; a vibration amplifying unit configured to amplify the vibration generating unit while transmitting the longitudinal vibration from the vibration generating unit; and a longitudinal-torsional vibration conversion slit unit having slits formed in a groove-like shape on the surfaces of the vibration amplifying unit and configured to convert the longitudinal vibration into torsional vibration. The vibration amplifying unit has a polygonal shape in a plane view, and has a plurality of surfaces provided with slits along with a surface not provided with slits.

Growing community of inventors

Tokyo, Japan

Takuya Asami