Shimadzu Corporation

Takuto Onishi

Junichiro Kozaki

Yoshihiro Nagano

Masaki Ohfuji

Toshiki Yamaguchi

The provision of the components requiring cooling on top of the cooling mechanism enables the cooling efficiency to be increased. Furthermore, a case of a control device is attached to the cooling mechanism whereon the components requiring cooling are disposed. The cooling mechanism fulfills the role of the contact surface of the case of the control device with the turbomolecular pump main unit, where the case does not have a case panel on the contact surface with the turbomolecular pump main unit. The cooling mechanism fulfills the role of one surface of the case for the control device, where the cooling mechanism is structured integrally with the control device. Additionally, the turbomolecular pump main unit, the cooling mechanism, and the control device are structured integrally by the turbomolecular pump main unit and the cooling mechanism being in contact.

Turbomolecular pump

A turbo-molecular pump, includes a blade pumping section having a plurality of rotor blades and a plurality of stator blades which are alternately arranged in plural stages along an axial direction of the pump, and a thread groove pumping section having a cylindrical-shaped screw stator, and a rotor cylinder adapted to be rotated inside the screw stator. The rotor cylinder has a lower edge surface located on an upstream side relative to a downstream edge of the screw stator with respect to the axial direction. The turbo-molecular pump of the present invention can minimize flying-out of broken pieces of the rotor cylinder from a discharge port.

Growing community of inventors

Kyoto, Japan

Takuto Onishi