Hitachi High-tech Corporation

Takumu Iwanaka

Yoshifumi Sekiguchi

Shin Imamura

Hajime Kawano

Toshiaki Kusunoki

Laila Ambar Sari

Provided are a charged particle detector and a radiation detector capable of obtaining an observation image with correct contrast without saturation even when the number of signal electrons incident on a detector is increased due to an increase in the current of a primary electron beam. The charged particle detector is characterized by having a scintillator () having a signal electron detection surface () for detecting signal electrons emitted when a specimen is irradiated with primary electrons and converting the signal electrons into light, a light detector () having a light detection surface () for detecting the light emitted from the scintillator (), and a light guide () disposed between the scintillator () and the light detector (), wherein the area of the light detection surface () is larger than the area of the signal electron detection surface ().

Charged particle detector, charged particle ray device, radiation detector, and radiation detection device

A charged-particle detecting deviceor a radiation detecting devicedetects charged particles or radiation as a detection target. These detection devices are each provided with: a scintillatorprovided with a fluorescent layerthat converts the detection target into light; a light detectorthat detects the lightemitted from the scintillator; a light guideprovided between the scintillatorand the light detector; and a blocking partthat blocks a portion of the detection target incident on the scintillatoror the light emitted from the scintillator

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Tokyo, Japan

Takumu Iwanaka