Ulvac, Inc.

Takumi Namekawa

Junpei Yuyama

Robert F Taff

Masao Murata

Yuya Inoue

Yoshio Sunaga

Koji Hane

Masasuke Matsudai

Ralph D Fox

Kouji Hane

Hidenori Suwa

Kei Baba

Robert R McKay

A technology for placing spacers free from the occurrence of streaks is provided. Random numbers are generated by a computer, and made in one-by-one association with discharge positions of an object for discharging every generation, and stored in a memory unit of the computer. Coefficient values are determined for the respective discharge positions based on the stored random numbers, and individual voltage values to be required for the respective discharge positions are calculated through the multiplication of voltages set for respective nozzle holes Nto Nby the coefficient values. When the respective voltages corresponding to the discharge positions are applied to piezoelectric elements inside a discharge head and a discharge liquid containing the spacers are discharged through the plural nozzles Nto Nprovided in the discharge head, the spacers are placed on the object for discharging by numbers according to the random numbers.

Spacer placing method

The present invention provides applicators reducing generating bubble. Dispersion liquid is supplied while the pressure of a circulation tank on the delivery side is lower than the atmospheric pressure but higher than the pressure of the space in buffer tanks. The dispersion liquid in the discharge chambers is recovered while the pressure in a circulation tank serving as recovery destination is lower than the atmospheric pressure. Gas dissolution can be reduced because the dispersion liquid does not come into contact with gases at pressures higher than the atmospheric pressure and engulffing gas or deformation of solid microparticles can be avoided because no pump is used.

Applicator and method for transferring dispersion liquid

Growing community of inventors

Chigasaki, Japan

Takumi Namekawa